Tunable metamaterials with carrier-induced effective permittivity for active control of electromagnetic fields in semiconductor manufacturing device
Minyeul Lee,
Sungyoung Yoon,
Meehyun Lim
et al.
Abstract:Precise control of electromagnetic fields is critical in many advanced manufacturing processes, such as those used in the semiconductor industry, where device performance relies on precision and uniformity. Here, we introduce a solution to control electromagnetic fields via permittivity modulation without the limitations of resonance-based approaches, through a patterned semiconductor enabling permittivity tuning via carrier-density modulation. This carrier-responsive metamaterial (CRM) exhibits frequency-inde… Show more
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