Tunable laser interference lithography preparation of plasmonic nanoparticle arrays tailored for SERS

Abstract

The facile preparation of arrays of plasmonic nanoparticles over a square centimeter surface area is reported. The developed method relies on tailored laser interference lithography (LIL) that is combined with dry etching and it offers means for the rapid fabrication of periodic arrays of metallic nanostructures with well controlled morphology. Adjusting the parameters of the LIL process allows for the preparation of arrays of nanoparticles with a diameter below hundred nanometers independently of their lattice spacing. Gold nanoparticle arrays were precisely engineered to support localized surface plasmon resonance (LSPR) with different damping at desired wavelengths in the visible and near infrared part of the spectrum. The applicability of these substrates for surface enhanced Raman scattering is demonstrated where cost-effective, uniform and reproducible substrates are of paramount importance. The role of deviations in the spectral position and the width of the LSPR band affected by slight variations of plasmonic nanostructures is discussed.

Sensitive and Reproducible Gold SERS Sensor Based on Interference Lithography and Electrophoretic Deposition

“…The periodic Au nanodisk structure has the ability to change the resonant wavelength according to its diameter and period [ 22 , 41 , 42 ]. If the wavelength of the incident light source and the resonant wavelength are well matched, a maximized LSPR can be obtained.…”

“…Among the various SERS substrates, the periodic metal nanostructure has advantages: it has a reproducible signal, and its period and diameter can be controlled, enhancing the LSPR [ 22 ]. For this structure, we used laser interference lithography (LIL), which is a large-scale, simple, and low-cost process that can be performed in ambient conditions.…”

Parallel Laser Micro/Nano‐Processing for Functional Device Fabrication

“…LIL is a powerful tool for uniform large‐scale micro/nano‐structure fabrication. To achieve smaller features, pre/post‐processing is applied …”

“…To achieve smaller features, pre/post-processing is applied. [93][94][95][96][97][98][99] Figure 6a indicates periodic gratings on Ag-nanoparticle film fabricated by dual-beam nanosecond pulsed-laser LIL. [93] The Ag nanoparticles are pre-distributed onto the sample surface by a modified solution-evaporation method of Ag-nanoparticle colloids.…”

Metallic Nanoparticle-Based Optical Cell Chip for Nondestructive Monitoring of Intra/Extracellular Signals

“…LSPR on MNPs such as Au and Ag exhibited unique features underlying their strong absorption and scattering of light, making MNPs attractive candidates for the nanoprobes of the several biomolecules. Moreover, the EM field around MNPs results in the amplification of surface-enhanced Raman scattering (SERS) [32][33][34][35]. In addition, fluorescent signals can also be quenched or enhanced due to the energy transfer between the MNPs and fluorophore [36][37][38].…”