2020
DOI: 10.1002/adom.202001024
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Tunable Infrared Plasmon Response of Lithographic Sn‐doped Indium Oxide Nanostructures

Abstract: Transparent conductive oxides (TCOs) have strong potential for plasmonic applications. Given their easily tunable properties and low energy response, significant challenges in the controlled fabrication and precise characterization of TCOs must be better understood before this potential can be realized. Here, the mid‐ to near‐infrared plasmonic response of Sn‐doped In2O3 (ITO) nanostructures is presented, fabricated top‐down using electron beam lithography and radio‐frequency sputtering. These equilateral ITO … Show more

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Cited by 11 publications
(9 citation statements)
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“…Due to the fact that a 30 nanometer-thick silicon nitride (SiN) substrate (TEM grid) was used for conducting this experiment, this activity was identified as a phonon excitation in the SiN film. The energy of the restored phonon peak in this work, is fully aligned with the values reported for SiN phonon excitation in the literature 72 74 . Because of the vicinity of the SiN phonon peak to ZLP and the silver nanowire’s SP1 peak (dipole mode), spotting this peak in the raw experimental data would have been practically impossible.…”
Section: Resultssupporting
confidence: 90%
“…Due to the fact that a 30 nanometer-thick silicon nitride (SiN) substrate (TEM grid) was used for conducting this experiment, this activity was identified as a phonon excitation in the SiN film. The energy of the restored phonon peak in this work, is fully aligned with the values reported for SiN phonon excitation in the literature 72 74 . Because of the vicinity of the SiN phonon peak to ZLP and the silver nanowire’s SP1 peak (dipole mode), spotting this peak in the raw experimental data would have been practically impossible.…”
Section: Resultssupporting
confidence: 90%
“…It is worth noting that the proposed process is generic and might be very efficient for the production of nanostructures of a wide variety of alternative nonmetallic conductors, which are usually grown by sputter deposition, such as molybdenum nitride (MoN), tantalum nitride (TaN), ,, niobium nitride (NbN), In-doped tin oxide (ITO), ,, aluminum- or gallium-doped zinc oxide (AZO, GZO), ,,, niobium-doped titanium oxide (NTO), partly reduced molybdenum oxides MoO x ( x < 3), , and vanadium dioxide (VO 2 ), which exhibits a metal–insulator transition. , All these conductors have been proposed as alternative plasmonic materials, whose plasmonic activity spans the far-ultraviolet to medium-infrared range. ,,,,, …”
Section: Resultsmentioning
confidence: 99%
“…This study shows that doped semiconductors can effectively concentrate IR radiation at the nanoscale, leading to strong near electric-field enhancement factors on par with those associated with noble-metal nanoparticles in the visible spectral region. In parallel, other groups have studied the near-field plasmonic responses in nanotriangles and cube-shaped ITO nanocrystals, providing insights to effectively tune plasmonic responses to cover wide spectral regions. Optically dark plasmonic modes can also be accessed via STEM-EELS, providing important information to better understand energy-transfer mechanisms in plasmonic nanosystems. , …”
Section: Infrared Plasmonsmentioning
confidence: 99%