2018 IEEE International Electron Devices Meeting (IEDM) 2018
DOI: 10.1109/iedm.2018.8614595
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Truly Innovative 28nm FDSOI Technology for Automotive Micro-Controller Applications embedding 16MB Phase Change Memory

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Cited by 53 publications
(37 citation statements)
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“…Crystallization temperatures T x as a function of composition in the Ge-Sb-Te ternary phase diagram. This overview figure is drawn with data from refs 30,[34][35][36] , where these values were experimentally determined using asdeposited thin films. Two dashed lines are shown, including the pseudo-binary line (black) between Sb 2 Te 3 and GeTe, and the tieline (red) connecting Ge 2 Sb 1 Te 2 and Ge.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Crystallization temperatures T x as a function of composition in the Ge-Sb-Te ternary phase diagram. This overview figure is drawn with data from refs 30,[34][35][36] , where these values were experimentally determined using asdeposited thin films. Two dashed lines are shown, including the pseudo-binary line (black) between Sb 2 Te 3 and GeTe, and the tieline (red) connecting Ge 2 Sb 1 Te 2 and Ge.…”
Section: Resultsmentioning
confidence: 99%
“…Upon further enrichment in Ge content, T x can reach 350°C but with a much slower crystallization speed 28,29 . It was demonstrated that Ge-rich GST alloys function well in integrated memory chips at 190°C over 10 8 operation cycles 28 , making them suitable for automotive micro-controller applications 30 . However, phase segregation is a critical issue in these alloys.…”
Section: Introductionmentioning
confidence: 99%
“…Electrical characterizations have been performed on Wall-like PCM cells [5] fabricated on 28nm FD-SOI Technology [6]. Cell architecture is characterized by a strip of chalcogenide material laying on top of a thin heater element.…”
Section: Methodsmentioning
confidence: 99%
“…Resistive Random Access memories (RRAM) have been gaining popularity along the last 10 years as eFlash technologies became hard to co-integrate in advanced technology process [1]. In that context, 2-terminal RRAM like filamentary RRAM (ReRAM) [5], Phase Change Memories (PCM) [7] or Spin Transfer Torque Magnetic RRAM (STT-MRAM) [4] are now considered as serious industrially viable solutions.…”
Section: A Resistive Memory Architecturesmentioning
confidence: 99%
“…Hence, emerging resistive non volatile memories came in as a promising solution as they enable zero-leakage, low-cost integration and relatively high performances. In regard with these specifications, they are usually considered as a potential game changer and, beyond the replacement of eFlash in sub-28nm nodes [1], the scientific community considers their direct integration inside the memory hierarchy (Caches replacement or enhancement for e.g. [2]).…”
Section: Introductionmentioning
confidence: 99%