Trimming of silicon-on-insulator devices via localised laser annealing  (Conference Presentation)

Biryukova, Vera; Sharp, Graham; Klitis, Charalambos; Ruddell, Sarah; Sorel, Marc

doi:10.1117/12.2507212

Silicon Photonics XIV 2019

DOI: 10.1117/12.2507212

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Trimming of silicon-on-insulator devices via localised laser annealing (Conference Presentation)

Vera Biryukova

Graham Sharp

Charalambos Klitis

et al.

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Trimming of silicon-on-insulator devices via localised laser annealing (Conference Presentation)

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