1995
DOI: 10.1557/jmr.1995.1403
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Tribology of diamond-like carbon sliding against itself, silicon nitride, and steel

Abstract: Diamond-like carbon (DLC) films were deposited on (100) silicon wafers and silicon nitride balls by RF plasma-assisted chemical vapor deposition at a pressure of 700 mTorr and a substrate temperature of 360 K. The friction coefficient and the wear rates were measured using a pin-on-disk tribometer in 40% humid and dry air. Friction coefficients are near 0.05 in all cases measured. In dry air, the wear of silicon nitride and steel against DLC is below measurement capability because of a protecting DLC transfer … Show more

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Cited by 61 publications
(22 citation statements)
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“…The in situ results support two earlier inferences from past ex situ analyses: (1) solid lubricant coatings like DLC [12,[34][35][36][37][38][39] and MoS 2 [17,18,[40][41][42][43] rely on transfer films to maintain low friction and wear, and (2) interfacial sliding is the dominant VAM. In situ optical images and video recordings of the sliding interface confirmed how this friction behavior might be controlled by third bodies.…”
Section: Discussionsupporting
confidence: 86%
“…The in situ results support two earlier inferences from past ex situ analyses: (1) solid lubricant coatings like DLC [12,[34][35][36][37][38][39] and MoS 2 [17,18,[40][41][42][43] rely on transfer films to maintain low friction and wear, and (2) interfacial sliding is the dominant VAM. In situ optical images and video recordings of the sliding interface confirmed how this friction behavior might be controlled by third bodies.…”
Section: Discussionsupporting
confidence: 86%
“…The specific wear rate of harder a-CN x coating was much higher than that of the softer SiC ball in all conditions. This phenomenon has already been reported by Jia et al [50] when they studied the tribology of DLC coating sliding against Si 3 N 4 ball. The wear rate of DLC film was higher than that of Si 3 N 4 ball, which was accredited to transfer of tribo-layer from disk to ball.…”
Section: Discussionsupporting
confidence: 77%
“…1.7 Â 10 368 was found for pin-on-disk testing of silicon nitride on 369 DLC in dry air by Jia et al [56]. Kim, Fischer, and 370 Gallois also performed pin-on-disk testing of the same 371 material system and found higher wear rates 372 ($10 )7 mm 3 N )1 m )1 ) for 50% RH air [57].…”
mentioning
confidence: 86%
“…Jia et al 519 obtained a friction coefficient of $0.05 for pin-on-disk 520 sliding of DLC against silicon nitride in dry air [56]. 521 Kim, Fischer, and Gallois also investigated pin-on-disk 522 sliding of Si 3 N 4 on DLC in various gaseous environments …”
Section: U N C O R R E C T E D P R O O Fmentioning
confidence: 99%