Tribological study of CN  films prepared by reactive d.c. magnetron sputtering

Hajek, V.; Rusnak, K.; Vlček, Jaroslav; Martinů, L.; Hawthorne, H.M.

doi:10.1016/s0043-1648(97)00176-2

Cited by 69 publications

(9 citation statements)

References 20 publications

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“…Hardness of CN x coatings prepared by magnetron sputtering depends on many factors and a wide range of values can be found in literature [19]. In our case, the hardness is very low in the range 1.8-4.2 GPa when the N concentration in the films varies from 16 to 28 at.…”

Section: Hardnessmentioning

confidence: 61%

Mechanical and tribological characterization of CN_x films deposited by d.c. magnetron sputtering

Ipaz

Yate

Polcar

et al. 2007

Phys. Status Solidi (c)

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Carbon nitride (CN x ) thin films were deposited onto silicon and steel substrates at 400 °C from a carbon target by d.c. magnetron sputtering system. The composition, structural, and mechanical properties of deposited films were investigated as a function of argon/nitrogen concentration and sputtering power, by means of Energy Dispersive X-ray Spectroscopy (EDS), Fourier Transform Infrared Spectroscopy (FTIR), Raman Spectroscopy (RS), and nanoindentation. The EDS and Elastic Forward Analisys Analysis (EFA) showed that the nitrogen concentration in the CN x deposited films varied between 16% and 28% at depending on nitrogen concentrations in argon/nitrogen gas mixture, and deposition power. FTIR analysis indicated the presence of 2266 and 2278 cm -1 stretching peaks associated with CN triple bonds of nitriles and isocyanides, 1640 cm -1 and 1545 cm -1 associated with the C=C and C=N bonds. The thickness of the CN x deposited films varied between 0.4 and 0.8 µm at different sputtering powers. The hardness and Young's modulus were investigated by depth sensing nanoindentation method. The obtained hardness and Young's modulus increased from 4 to 17 GPa, and from 50 to 170 GPa, respectively; when the nitrogen content in the deposited films diminished between 28 and 12 %. On the other hand, the friction and wear tests were done using a pin-on-disc tribometer. The friction tests showed values of 0.05 and 0.4 in dry air and humid atmosphere; respectively.

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Section: Hardnessmentioning

confidence: 61%

Mechanical and tribological characterization of CN_x films deposited by d.c. magnetron sputtering

Ipaz

Yate

Polcar

et al. 2007

Phys. Status Solidi (c)

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“…But due to the dissociation energy of C-C bonds in a-C film lower than that of C-N bonds in a-CN x film, the thermal and oxidative stability temperature of DLC or a-C coating was much lower than that of a-CN x [18][19][20]. For a-CN x coatings, many scientists have paid more attentions to their micro-and macro-tribological properties in various gas environments since 1996 [21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36], but most of researches are usually related to the performance of a-CN x coatings in hard disk drive applications. It is known that the usage of DLC or a-CN x coating with water-based lubricant containing a little additive might create the new, ''green'' lubricant [37][38][39][40][41][42].…”

Section: Introductionmentioning

confidence: 99%

Friction and wear properties of CNx/SiC in water lubrication

2005

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Amorphous carbon nitride coatings (a-CN x ) were deposited on SiC disk by ion beam assisted deposition (IBAD). The tribological behavior of a-CN x coating sliding against SiC ball in water was investigated and compared with that of SiC/SiC system at room temperature. The influences of testing conditions on friction coefficient and specific wear rate of both kinds of tribopairs were studied. The worn surfaces on disks were observed by scanning electron microscope (SEM). The results indicate that the running-in period of a-CN x /SiC was shorter than that of SiC/SiC system in water. At a sliding velocity of 120 mm/s, the mean steady-state friction coefficients of SiC/SiC (0.096) was higher than that of a-CN x /SiC (0.05), while at 160 mm/s, lower friction coefficient (0.01) was obtained for SiC/SiC in water. With an increment of normal load, the mean steady-state friction coefficients after running-in first decreased, reaching a minimum value, and then increased. For self-mated SiC, the specific wear rate of SiC ball was a little higher than that of SiC disk, while for a-CN x /SiC, the specific wear rate of SiC ball were 10 times smaller than that of a-CN x coating. Furthermore, the specific wear rate of SiC ball sliding against a-CN x coating was reduced by a factor up to 100$1000 in comparison to that against SiC in water. The wear mechanism of SiC/SiC system in water is related to micro-fracture of ceramic and instability of tribochemical reaction layer. Conversely, wear mechanism for a-CN x /SiC is related to formation and transfer of easy-shear friction layer.

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“…Hajek and co-workers [38] proposed an expression to calculate the elastic recovery for the coatings. In this research, Fig.…”

Section: Hardness and Elastic Modulusmentioning

confidence: 99%

Determination of physical properties for β-TCP + chitosan biomaterial obtained on metallic 316L substrates

Mina

Castano

Caicedo

et al. 2015

Materials Chemistry and Physics

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Tribological study of CN films prepared by reactive d.c. magnetron sputtering

Cited by 69 publications

References 20 publications

Mechanical and tribological characterization of CN_x films deposited by d.c. magnetron sputtering

Mechanical and tribological characterization of CN_x films deposited by d.c. magnetron sputtering

Friction and wear properties of CNx/SiC in water lubrication

Determination of physical properties for β-TCP + chitosan biomaterial obtained on metallic 316L substrates

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Tribological study of CN films prepared by reactive d.c. magnetron sputtering

Cited by 69 publications

References 20 publications

Mechanical and tribological characterization of CNx films deposited by d.c. magnetron sputtering

Mechanical and tribological characterization of CNx films deposited by d.c. magnetron sputtering

Friction and wear properties of CNx/SiC in water lubrication

Determination of physical properties for β-TCP + chitosan biomaterial obtained on metallic 316L substrates

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Product

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Mechanical and tribological characterization of CN_x films deposited by d.c. magnetron sputtering

Mechanical and tribological characterization of CN_x films deposited by d.c. magnetron sputtering