Tribological studies of Zr-implanted PVD TiN coatings deposited on stainless steel substrates

Purushotham, K.P.; Ward, Liam; Brack, Narelle; Pigram, Paul J.; Evans, Peter; Noorman, Hans; Manory, Rafael R.

doi:10.1016/s0043-1648(03)00187-x

Cited by 39 publications

(14 citation statements)

References 11 publications

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“…Thus, they suggest that differences in surface free energy are the dominating factor for the different performance. It has been reported in our earlier studies that TiC films deposited using reactive pulsed DC magnetron exhibited macroscopic COF values in the 0.5-1.2 range [5], and for TiN films COF values of 0.9 have been reported [28]. For Ti-C-N coating COF values have been reported to be in the 0.2-0.25 range [4].…”

Section: Nanomechanical Propertiesmentioning

confidence: 53%

Deposition and Nanotribological Characterization of Sub-100-nm Thick Protective Ti-Based Coatings for Miniature Applications

et al. 2011

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Ti-based protective thin films with thicknesses below 100 nm, intended for miniature applications were deposited using physical vapor deposition magnetron sputtering. X-ray diffraction (XRD), scanning electron microscopy, and atomic force microscopy were employed for the assessment of microstructure, morphology, film thickness, surface topography, and roughness. XRD pattern showed the formation of f.c.c TiN, TiCN, and TiC phases with different preferred orientations for films prepared in Ar/N 2 , Ar/N 2 ? C 2 H 2 , and Ar/C 2 H 2 gas mixtures, respectively. Nanotribological performance was investigated using multipass nanoscratch technique at variable applied normal loads (100-400 lN). The nanoscale coefficient of friction was found to be in the 0.08-0.1 range, a sufficiently low value showing the potential of these films for miniature applications, such as microelectromechanical systems. The nanowear resistance at mean contact pressures in the range of 5-8.5 GPa for each sample was evaluated in terms of the average residual wear depth and an abrasive-dominated wear mechanism was found.

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Section: Nanomechanical Propertiesmentioning

confidence: 53%

Deposition and Nanotribological Characterization of Sub-100-nm Thick Protective Ti-Based Coatings for Miniature Applications

et al. 2011

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“…23) It has been also reported in the abrasive wear that debris is deposited either into the wear track or on the sides of the wear track. 24) In the TiBC and TiBC-40SiC films (Figs. 4(A) and 4(B)), the wear track about 200 μm wide is seen with some ridges/grooves running in parallel to the track and debris piled up at the sides, in which the 22 and 23 wt% as the sum of Fe/Cr for TiBC and TiBC-40SiC coatings, respectively, was detected mainly at location 3.…”

Section: Wear Measurements Of Composite Sic-tibcmentioning

confidence: 99%

Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD

Shimada

Fuji

Kiyono

et al. 2009

J. Ceram. Soc. Japan

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Composite TiBC-SiC film coatings with various contents of SiC were deposited on Si wafer at 800°C from a mixed solution of titanium tetra-ethoxide, boron tri-ethoxide and/or hexa-methyl-disiloxane by an Ar/H2 thermal plasma CVD. The crystalline phases (TiB2, TiC, SiC) in the coatings are identified by thin film grazing incidence X-ray diffraction. The surfaces and crosssections of the monolithic TiBC and SiC and composite TiBC-SiC coatings are observed by scanning electron microscopy. The microstructure of a cross-section of composite TiBC-55 mol% SiC film is observed by transmission electron microscopy with EDX analysis. The wear rates of the composite TiBC-SiC film are evaluated from cross-sectional profiles of the residual wear tracks formed by ball-on-disk wear tests using SUS and alumina balls with their results correlated with the SiC content and film hardness.

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“…Por essas características ele é muito usado como cobertura para ferramentas de corte [3] como fresas e brocas que adquirem alta dureza e baixo desgaste por atrito fazendo com que tenham maior vida útil e bom desempenho de corte. É um material que, por sua biocompatibilidade, pode ser usado como revestimentos em implantes dentários, reduzindo a proliferação e a adesão bacteriana [4].…”

Section: Introductionunclassified

Deposição de filmes finos de nitreto de titânio em plasma com efeito de comprimento de catodo oco em gaiola catódica

Silva¹,

Bottoni²,

Gontijo³

et al. 2017

Matéria (Rio J.)

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RESUMO A utilização de gaiola catódica se apresenta com um grande potencial de deposição de filmes finos e espessos, seja em substrato de vidro ou em peças metálicas. São inúmeras as possibilidades dessa técnica. Neste trabalho, a descarga de plasma em gaiola catódica foi usada para deposição de filmes de nitreto de titânio em substrato de vidro. O objetivo foi o de comparar as propriedades dos filmes depositados com uso de duas gaiolas com tampas de espessuras diferentes. Para caracterização dos filmes foram feitas análises por difração de raios X, medidas de espessura por reflectometria, medidas de resistividade elétrica, transmitância e imagens das superfícies por microscopia eletrônica de varredura e análise da composição por EDS. A reflectometria mostrou que a taxa de deposição e a rugosidade dos filmes aumentaram com a utilização de tampa de maior espessura (10 mm). O filme depositado na atmosfera de 155 sccm de N2 , 95 sccm de H2 e pressão de 0,5 Torr apresentou baixa transmitância na região do vermelho e infravermelho próximo, tornando-o um candidato para ser utilizado como filtro de infravermelho.

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Tribological studies of Zr-implanted PVD TiN coatings deposited on stainless steel substrates

Cited by 39 publications

References 11 publications

Deposition and Nanotribological Characterization of Sub-100-nm Thick Protective Ti-Based Coatings for Miniature Applications

Deposition and Nanotribological Characterization of Sub-100-nm Thick Protective Ti-Based Coatings for Miniature Applications

Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD

Deposição de filmes finos de nitreto de titânio em plasma com efeito de comprimento de catodo oco em gaiola catódica

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