Tribological Properties of nc-TiC/a-C:H Coatings Prepared by Magnetron Sputtering at Low and High Ion Bombardment of the Growing Film

Soucek, P.; Schmidtová, T.; Buršíková, V.; Vašina, P.; Pei, Y.T.; Hosson, J.Th.M. De; Caha, O.; Perina, V.; Mikšová, R.; Malinský, P.

doi:10.14332/svc13.proc.1090

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Journal Of Nanomaterials1

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2017

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“…In this work hybrid PVD-PECVD process consisting of sputtering of a metallic target in reactive hydrocarbon atmosphere [4,[23][24][25][26] is used to synthesize nanocomposite hydrogenated nc-Ti-Ni-C/a-C:H coatings. The hybrid process instead of cosputtering was used to further expand the concept proposed for hydrogen free coatings [22].…”

Section: Journal Of Nanomaterialsmentioning

confidence: 99%

Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings

Daniel¹,

Souček²,

Bernátová³

et al. 2017

Journal of Nanomaterials

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Nanocomposite nc-TiC/a-C:H thin films exhibit unique combination of mechanical properties, high hardness, low friction, and wear. Selective doping by weak-carbide forming element can be used in order to specifically design the physical and chemical properties of nc-TiC/a-C:H coatings. In this paper we report on an effect of nickel addition on structure and hardness of the nc-TiC/a-C:H coatings. The effect of Ni alloying on the coating structure under conditions of DCMS and HiPIMS depositions was studied. The coating structure was correlated with the coating hardness. The grain size, the grain carbon vacancy concentration, and the mean grain separation were found to be the key parameters determining the coating hardness. Ni doping proved to have a significant effect on the coating microstructure which resulted in changes of the hardness of the deposited coatings.

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