“…For example, as protective coatings in silicon-based microelectromechanical system (MEMS) technology in which the relatively high brittleness and low fracture toughness at room temperature restrict their reliability under mechanical stress [6][7][8]. Another important application of DLC films is to act as overcoats for heads and magnetic media in hard disk and tape drive systems where the protective layers should be resistant to wear and corrosion, but thin enough not to impede the high density recording capability [9][10][11][12]. In both cases, film thickness is usually in the range from 2-100 nm.…”