Tribological behaviour of hard coatings deposited by arc-evaporation PVD

Rodríguez, Rafael; Garcı́a, J.A.; Medrano, A.; Rico, M.; Sánchez, R; Martı́nez, R.; Labrugère, Christine; Lahaye, Michel; Guette, A.

doi:10.1016/s0042-207x(02)00248-8

Cited by 104 publications

(37 citation statements)

References 12 publications

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“…The coatings were deposited on 1 micrometre polished high speed steel and 304L stainless steel substrates which were subjected to three-fold rotation. The deposition temperature was maintained at 400° C whereas the bias voltage (U b ) was maintained at -75 V. 6 …”

Section: Methodsmentioning

confidence: 99%

“…Nanoscale multilayer CrN/NbN PVD coatings have been successfully deposited by various techniques such as Cathodic Arc Evaporation (CA), Unbalanced Magnetron (UBM) Sputtering and Arc Bond Sputtering (ABS), (combination of CA etching followed by UBM sputtering coating deposition) [3][4][5]. However coating deposition by these techniques has fundamental limitations; growth defects due to macroparticle formation in processes employing CA technique [4,6] and under dense structures with intergranular voids for UBM [7]. These growth defects are the weak areas in the coating which not only affect its mechanical properties [8,9] but also affect its corrosion resistance by facilitating 'solution path' galvanic corrosion [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

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Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering

Purandare¹,

Ehiasarian²,

Hovsepian³

2008

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Nanoscale multilayer CrN/NbN PVD coatings are gaining reputation for their high corrosion and wear resistance. However the CrN/NbN films deposited by ABS TM (Arc Bond Sputtering) technology have some limitations such as macro droplets, porosity and less dense structures.The novel HIPIMS (High Power Impulse Magnetron Sputtering) technique produces macroparticle free, highly ionised metal plasma which brings advantages in both surface pretreatment and coating deposition stages of the PVD process.In this study, nanoscale multilayer CrN/NbN PVD coatings were pre-treated and deposited with HIPIMS technology and compared with those deposited by HIPIMS-UBM and by the 2 ABS TM technique. In all cases Cr + etching was utilised to enhance adhesion by low energy ion implantation. The coatings were deposited at 400° C with substrate biased (U b ) at -75 V.During coating deposition, HIPIMS produced significantly high activation of Nitrogen compared to the UBM as observed with mass spectroscopy.HIPIMS-deposited coatings revealed a bi-layer period of 4.1 nm (total thickness-2.9 µm) and hardness of 3025 HK 0.025 . TEM results revealed droplet free, denser microstructure with

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering

Purandare¹,

Ehiasarian²,

Hovsepian³

2008

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…The layers Zr-N won a lot of attention recently in various sectors, such as in microelectronics, as barriers of broadcasting in integrated circuits [17,18], thanks to their weak electric resistivity [19] in comparison with Ti-N and for applications of the hard covers thanks to a big corrosion resistance [20,21], a big hardness [22,23], a weak coefficient of friction [24], a good adhesion with the support, and a very important electric and thermal conductivity [25,26].…”

Section: Introductionmentioning

confidence: 99%

Mechanical and Structural Studies of Ternary Mo–Zr–N Layers Deposited on Substrate by PVD

Abboudi¹,

Chermime²,

Djebaili³

et al. 2017

Metallofiz. Noveishie Tekhnol.

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Our study of ternary Mo-Zr-N thin layers is novel with the objective of improving certain mechanical and tribological characteristics and of finding the appropriate stoichiometry to have the microstructure, which orientates to the desired properties, using the characterization techniques: SEM, XRD, EDS, XPS, WDS and similar methods as well as nanoindentation, alternative tribometry and scratch test. The morphological study of ternary Mo-Zr-N coating shows that the (111) orientation of texture is preferred essentially due to residual internal stresses. During the development of the Mo-Zr-N deposits, we have noticed that the addition of Zr results in multiphases consisting of binary ZrN, MoN and MoZrN nitrides with a prism-shaped structure. The coefficient of friction is low for Mo-N coating and low zirconium levels. The Young's modulus takes values almost very close that is indicated for values below 100 at.% of Zr. The crystalline structure does not affect the resistance capacity of the material. The introduction of zirconium particles destabilizes the compound because zirconium atomic radius (0.138 nm) is higher than that of molybdenum (0.126 nm), and the lattice is distorted that explains these residual stresses.Keywords: microstructure, morphology, texture, hardness, Young's modulus, covers, PVD. Ключевые слова: ìèêðîстðóêтóðà, îстàтî÷íûå íàïðÿжåíèÿ, тåêстóðà, тâёðäîстü, ìîäóëü Юíгà, ïîêðûтèå, íàíåсåíèå ïîêðûтèÿ îсàжäåíèåì ïàðîâ.

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“…TiCN-based cermet coatings combine the advantages of the high hardness of TiC, the ductility of TiN, and high adhesion strength, giving TiCN--based cermet coatings significantly improved mechanical properties relative to TiC or TiN coatings. Therefore, TiCN coatings are highly promising for various wear applications [4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Process and properties of TiC0.7N0.3-based cermet coating deposition on steel by electrospark deposition technique

Korkmaz¹,

Bakan²

2010

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Electrospark deposition (ESD) method is a promising process to produce hard and wear--resistant coatings on metallic substrates. In this study, ESD has been successfully applied to deposit TiC0.7N0.3-based cermet coatings on steel substrate. It has been possible to obtain a fully dense and strong adherent coating layer with a thickness of 20 µm. The microstructures of the deposited coatings were characterized by X-ray diffraction (XRD) and scanning electron microscopy. In addition, the friction and wear properties of the coatings and substrates were investigated systematically by conducting ball-on-disc sliding wear tests. The experimental results demonstrate that the wear resistance of the steel substrate, which contains a TiCN coating deposited via the ESD process, is noticeably enhanced under the dry sliding wear conditions. In addition, while the microhardness of substrate is 232 HV on average, the microhardness of the coating reaches 870 HV onto the surface. K e y w o r d s : electrospark deposition (ESD), titanium carbonitride, micro-hardness, sliding wear

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Tribological behaviour of hard coatings deposited by arc-evaporation PVD

Cited by 104 publications

References 12 publications

Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering

Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering

Mechanical and Structural Studies of Ternary Mo–Zr–N Layers Deposited on Substrate by PVD

Process and properties of TiC0.7N0.3-based cermet coating deposition on steel by electrospark deposition technique

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