2006
DOI: 10.1109/tsm.2006.873511
|View full text |Cite
|
Sign up to set email alerts
|

Treatment of Chemical–Mechanical Planarization Wastes by Electrocoagulation/Electro- Fenton Method

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
16
0

Year Published

2007
2007
2022
2022

Publication Types

Select...
4
3
1

Relationship

1
7

Authors

Journals

citations
Cited by 25 publications
(18 citation statements)
references
References 9 publications
1
16
0
Order By: Relevance
“…7A) is consistent with a recent work by Mouedhen et al [22]. The low iron concentration in solution is attributed to the poor solubility of iron species in the range of the solution pH [23]. In turn, the minimum solubility of Al ions occurs at pH ∼ 6.3 [24] and as the pH increases, the formation of the soluble Al(OH) 4 − is favoured.…”
Section: Analysis Of Crystal Violet Electrocoagulation Under Our Optisupporting
confidence: 90%
“…7A) is consistent with a recent work by Mouedhen et al [22]. The low iron concentration in solution is attributed to the poor solubility of iron species in the range of the solution pH [23]. In turn, the minimum solubility of Al ions occurs at pH ∼ 6.3 [24] and as the pH increases, the formation of the soluble Al(OH) 4 − is favoured.…”
Section: Analysis Of Crystal Violet Electrocoagulation Under Our Optisupporting
confidence: 90%
“…Thus, several relatively new treatment methods including treatment trains have been developed/tested and/or reviewed [20][21][22][23]. In the literature, several researchers have reported that electrocoagulation (EC) [24][25][26] and electrofiltration (EF) [21,22] are effective in removing ultrafine particles from CMP wastewaters. Therefore, a simultaneous electrocoagulation/electrofiltration (EC/EF) process has been developed for evaluating its capability of treating various nanoparticles-containing wastewaters [15].…”
Section: Introductionmentioning
confidence: 99%
“…This technique, known as electrodecantation is suitable where recycle and reuse of particles is desirable. 15 The results of application of EC-EF technique to CMP wastewater from a semiconductor manufacturing facility in Taiwan 16 is shown in Figure 11. The treatment efficiency, as determined by lowest turbidity, was obtained when the electric field was applied to the waste stream at a pH of 9.…”
Section: Electrochemical Approach To Treatment Of Wastes From Semiconmentioning
confidence: 99%