“…5 Chemical pretreatments such as HCl, NH 4 OH, and (NH 4 ) 2 S, aiming to decrease native oxides and passivate the surface 6 followed by ALD processing, have been shown to provide high-k/GaSb structures with better interface quality. 3,4,7 In order to avoid undesirable oxidized interfacial layer formation, high-k oxide deposition directly on oxidefree GaSb surface may be more beneficial. Thermal desorption of sacrificial oxides, 8 hydrogen plasma, 9,10 or atomic hydrogen treatment 11 can be used to remove surface oxides on III-V compounds.…”