In the present state of the art, ion beam sputtering is used to produce low-loss
dielectric optics. During the manufacturing of a dielectric layer stack, the
deposition material must be changed, which requires rapid mechanical movement of
vacuum components. These mechanical components can be regarded as a risk factor
for contamination during the coating process, which limits the quality of
high-end laser components. To minimize the particle contamination, we present a
novel deposition concept that does not require movable components to change the
coating material during the coating process. A magnetic field guiding technique
has been developed, which enables the tuning of the refractive index in the
layer structure by sputtering mixtures with varying compositions of two
materials using a single-ion source. The versatility of this new concept is
demonstrated for a high-reflection mirror.