Transparent thin film thermocouple

Yust, M.; Kreider, Kenneth G.

doi:10.1016/0040-6090(89)90365-9

Cited by 25 publications

(7 citation statements)

References 9 publications

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“…[ 1 ] ITO is a promising candidate for a high‐temperature TFTC to monitor the temperature in gas turbines [ 31,32 ] or for applications where optical transparency is required. [ 33 ] The thicknesses of ITO and NiCr were varied between nominal values of 10 and 430 nm and confirmed with a stylus profilometer. The measurement setup and obtained results for the Seebeck coefficient are presented.…”

Section: Introductionmentioning

confidence: 99%

Effect of Thickness Variation on the Measured Seebeck Coefficient and Power Factor in ITO–NiCr Thin‐Film Thermocouples

Jiang

Xie

Heiss

et al. 2023

Physica Status Solidi (a)

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Herein, the electrical resistivity, Seebeck coefficient, and power factor of an indium tin oxide (ITO) and nickel‐chromium (NiCr) thermocouple are investigated. The thicknesses of the ITO and NiCr are varied between 10 and 430 nm. Seebeck coefficients between 12.8 and (21.4 ± 1.5) μV K−1 are measured, respectively. The results indicate that a reduction in thickness generally leads to an increase in the Seebeck coefficient until a maximum value is reached. Among the measured samples, the optimal Seebeck coefficients are found with an ITO thickness of (111 ± 4) nm and NiCr thickness of (18 ± 2) nm. Finally, the power factor of the thermocouples is determined, with a maximum power factor of (84 ± 7) μW m−1 K−2 for the ITO thickness of (111 ± 4) nm and nickel‐chromium thickness of (42 ± 5) nm.

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Section: Introductionmentioning

confidence: 99%

Effect of Thickness Variation on the Measured Seebeck Coefficient and Power Factor in ITO–NiCr Thin‐Film Thermocouples

Jiang

Xie

Heiss

et al. 2023

Physica Status Solidi (a)

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“…With increasing system integration, the devices must function on the micro-/nanoscale with high mechanical performance. Hence, the application of ITO-based thin films at high temperatures faces serious challenges. − …”

Section: Introductionmentioning

confidence: 99%

Superior Thermoelectric Performance of Robust Column-Layer ITO Thin Films Tuning by Profuse Interfaces

Luo

Cao

Gao

et al. 2022

ACS Appl. Mater. Interfaces

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Indium tin oxide (ITO) thin films suffer from poor chemical stability at high temperatures because of the instability of point defects and structural variations. An interface design strategy was proposed herein to improve this situation, where a robust ITO-based thin film with a column-layer structure was fabricated. Three types of column-layer ITO thin films were fabricated via magnetron sputtering. By tuning the interfaces, we controlled the effective mass and weighted mobility, enhancing the electrical conductivity (2.17 × 106 S m–1) and power factor (1138 μW m–1 K–2). The crack propagation path was prolonged because of the profuse interfaces between the columns and layers in the alternate thin films. Thus, enhanced nanohardness (16.5 GPa) was obtained. The structural evolution and performance of the column-layer ITO thin films annealed under different conditions were investigated. The atoms were restricted by the profuse interfaces, resulting in high-temperature stability. The results demonstrate that the interface design of ITO thin films can efficiently modify the stability of conductive ceramics over a wide temperature range, which has significant potential for applications in microdevices and aero engines.

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“…For this reason, thin film thermocouples and thin film pressure sensors are ideal for a variety of applications. Thin film thermocouples have a lower mass compared to wire thermocouples and, accordingly, respond faster [4].…”

Section: Introductionmentioning

confidence: 99%

Effects of AlN and BCN Thin Film Multilayer Design on the Reaction Time of Ni/Ni-20Cr Thin Film Thermocouples on Thermally Sprayed Al2O3

Tillmann

Kokalj

Stangier

et al. 2019

Sensors

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Thin film thermocouples are widely used for local temperature determinations of surfaces. However, depending on the environment in which they are used, thin film thermocouples need to be covered by a wear or oxidation resistant top layer. With regard to the utilization in wide-slit nozzles for plastic extrusion, Ni/Ni-20Cr thin film thermocouples were manufactured using direct-current (DC) magnetron sputtering combined with Aluminiumnitride (AlN) and Boron-Carbonitride (BCN) thin films. On the one hand, the deposition parameters of the nitride layers were varied to affect the chemical composition and morphology of the AlN and BCN thin films. On the other hand, the position of the nitride layers (below the thermocouple, above the thermocouple, around the thermocouple) was changed. Both factors were investigated concerning the influence on the Seebeck coefficient and the reaction behaviour of the thermocouples. Therefore, the impact of the nitride thin films on the morphology, physical structure, crystallite size, electrical resistance and hardness of the Ni and Ni-20Cr thin films is analysed. The investigations reveal that the Seebeck coefficient is not affected by the different architectures of the thermocouples. Nevertheless, the reaction time of the thermocouples can be significantly improved by adding a thermal conductive top coat over the thin films, whereas the top coat should have a coarse structure and low nitrogen content.

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Transparent thin film thermocouple

Cited by 25 publications

References 9 publications

Effect of Thickness Variation on the Measured Seebeck Coefficient and Power Factor in ITO–NiCr Thin‐Film Thermocouples

Effect of Thickness Variation on the Measured Seebeck Coefficient and Power Factor in ITO–NiCr Thin‐Film Thermocouples

Superior Thermoelectric Performance of Robust Column-Layer ITO Thin Films Tuning by Profuse Interfaces

Effects of AlN and BCN Thin Film Multilayer Design on the Reaction Time of Ni/Ni-20Cr Thin Film Thermocouples on Thermally Sprayed Al2O3

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