Transparent poly(bisphenol A carbonate)-based nanocomposites with high refractive index nanoparticles

Imai, Yusuke; Terahara, A.; Hakuta, Yukiya; Matsui, Kazumi; Hayashi, Hiromichi; Ueno, Nobuhiko

doi:10.1016/j.eurpolymj.2008.12.031

Cited by 99 publications

(89 citation statements)

References 47 publications

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“…The refractive index, n, as measured at different exposure times, is also shown in Figure 2d. The film approaches the previously reported 45 value of 2.1 at relatively fast exposure time (328 ms) and saturates beyond 655 ms exposure time.…”

Section: Resultssupporting

confidence: 85%

Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO₂for Low-Temperature, Large-Area Applications

Mione

Katsouras

Creyghton

et al. 2017

ECS J. Solid State Sci. Technol.

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High permittivity (high-k) materials have received considerable attention as alternatives to SiO 2 for CMOS and low-power flexible electronics applications. In this study, we have grown high-quality ZrO 2 by using atmospheric-pressure plasma-enhanced spatial ALD (PE-sALD), which, compared to temporal ALD, offers higher effective deposition rates and uses atmospheric-pressure plasma to activate surface reactions at lower temperatures. We used tetrakis(ethylmethylamino)zirconium (TEMAZ) as precursor and O 2 plasma as co-reactant at temperatures between 150 and 250 • C. Deposition rates as high as 0.17 nm/cycle were achieved with N-and C-contents as low as 0.4% and 1.5%, respectively. Growth rate, film crystallinity and impurity contents in the films were found to improve with increasing deposition temperature. The measured relative permittivity lying between 18 and 28 with leakage currents in the order of 5 × 10 −8 A/cm 2 demonstrates that atmospheric PE-sALD is a powerful technique to deposit ultrathin, high-quality dielectrics for low-temperature, large-scale microelectronic applications. The continuous improvement in performance of integrated circuits has been based on miniaturization of components. The effective gate length in field-effect transistors shrinks to smaller and smaller sizes and, consequently, the thickness of the gate oxide decreases.1 SiO 2 has been the most popular gate oxide material used in microelectronic manufacturing due to its thermal stability and ideal interface quality on Si. However, during the past fifty years the thickness of the SiO 2 gate oxide has already been reduced to its physical limit of 1.2 nm, below which a critical gate leakage of 1 A/cm 2 is exceeded. 2 To overcome this problem, dielectrics with a high permittivity (high-k materials) have been extensively investigated as promising substitutes of the conventional SiO 2 for CMOS and DRAM technology. The high permittivity (k > 10) ensures high capacitance for thicker gate oxide layers while greatly reducing tunneling and gate leakage currents. 3,4 Among high-k oxides, ZrO 2 is considered one of the most promising SiO 2 alternatives due to its high dielectric constant (k = 20-25), large bandgap (5.1-7.8 eV) and thermodynamical stability. 5,6 ZrO 2 proved to be a good dielectric in transistor applications with leakage current of the order of 10 −6 -10 −9 A/cm 2 and in DRAM capacitor applications especially when present in ZrO 2 /Al 2 O 3 /ZrO 2 nanolaminate structures.7 High-k materials are also relevant for low-power applications of flexible electronics. 5,8-11High-k materials are deposited in a variety of chemical and physical deposition techniques including metallorganic chemical vapor deposition (MOCVD), atomic layer deposition (ALD), sol-gel and sputtering. ALD has proven to be the most suitable technique for high-k deposition due to its unique nanoscale thickness and layer uniformity control. In its conventional time-sequenced mode, ALD is a gas phase deposition technique in which the substrate surface is exposed altern...

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Section: Resultssupporting

confidence: 85%

Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO₂for Low-Temperature, Large-Area Applications

Mione

Katsouras

Creyghton

et al. 2017

ECS J. Solid State Sci. Technol.

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“…PC-zirconia nanocomposites are promising materials due to the interesting optical properties of the final product [12][13][14]. The nanocomposites prepared by in situ polymerization were found to be highly transparent with up to 50 wt.% ZrO 2 nanoparticles, and exhibited good thermal stability, hardness and elastic modulus.…”

Section: Introductionmentioning

confidence: 98%

Influence of the modification, induced by zirconia nanoparticles, on the structure and properties of polycarbonate

Motaung

Saladino

Luyt

et al. 2013

European Polymer Journal

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a b s t r a c tMelt compounding was used to prepare polycarbonate (PC)-zirconia nanocomposites with different amounts of zirconia. The effect of the zirconia loading, in the range of 1-5 wt.%, on the structure, mechanical properties and thermal degradation kinetics was investigated. The zirconia nanoparticle aggregates were well dispersed in the PC matrix and induced the appearance of a local lamellar order in the polycarbonate as inferred by SAXS findings. This order could be a consequence of the intermolecular interactions between zirconia and the polymer, in particular with the quaternary carbon bonded to the methyl groups and the methyl carbon as inferred from the NMR results. The presence of zirconia caused a decrease in the storage and loss moduli below the glass transition temperature. However, the highest amount of zirconia increased the modulus. The presence of zirconia in PC slightly increased the thermal stability, except for the highest zirconia content which showed a decrease. The activation energies of thermal degradation for the nanocomposites were significantly lower than that for pure PC at all degrees of conversion.

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“…The incorporation of small amounts of metal oxide nanoparticles into the polymer matrices was found to remarkably improve dimensional stability, and the mechanical, thermal, optical, electrical, and gas barrier properties, as well as to decrease the flammability [1][2][3][4][5][6]. PC-silica nanocomposites, prepared by various methods, attracted the attention of many institutions due to their improved transparency and mechanical properties [7,8].…”

Section: Introductionmentioning

confidence: 99%

The effect of silica nanoparticles on the morphology, mechanical properties and thermal degradation kinetics of polycarbonate

Motaung

Saladino

Luyt

et al. 2012

Composites Science and Technology

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a b s t r a c tPolycarbonate/silica nanocomposites with different silica quantities were prepared by a melt compounding method. The effect of silica amount, in the range 1-5 wt.%, on the morphology, mechanical properties and thermal degradation kinetics of polycarbonate (PC) was investigated. Clusters of silica nanoparticles were well dispersed in the polycarbonate whose structure remained amorphous. NMR results showed intermolecular interactions involving the carbonyl groups of different polymeric chains which did not affect the intramolecular rotational motions. The presence of the lowest silica content showed a decrease in the storage and loss moduli below the glass transition temperature, probably due to a plasticization effect. However, an increase in the amount of silica increased the moduli. The presence of silica in PC slightly increased the thermal stability, except for the highest silica content which showed a decrease. The activation energies of thermal degradation for the nanocomposites depended on the amount of silica and on the degree of conversion.

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Transparent poly(bisphenol A carbonate)-based nanocomposites with high refractive index nanoparticles

Cited by 99 publications

References 47 publications

Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO₂for Low-Temperature, Large-Area Applications

Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO₂for Low-Temperature, Large-Area Applications

Influence of the modification, induced by zirconia nanoparticles, on the structure and properties of polycarbonate

The effect of silica nanoparticles on the morphology, mechanical properties and thermal degradation kinetics of polycarbonate

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Transparent poly(bisphenol A carbonate)-based nanocomposites with high refractive index nanoparticles

Cited by 99 publications

References 47 publications

Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO2for Low-Temperature, Large-Area Applications

Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO2for Low-Temperature, Large-Area Applications

Influence of the modification, induced by zirconia nanoparticles, on the structure and properties of polycarbonate

The effect of silica nanoparticles on the morphology, mechanical properties and thermal degradation kinetics of polycarbonate

Contact Info

Product

Resources

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Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO₂for Low-Temperature, Large-Area Applications

Atmospheric Pressure Plasma Enhanced Spatial ALD of ZrO₂for Low-Temperature, Large-Area Applications