Transmission Enhancement in Coaxial Hole Array Based Plasmonic Color Filter for Image Sensor Applications

Abstract

Plasmonic color filters based on the hexagonal arrangement of coaxial hole array in aluminum have been demonstrated as a promising candidate for color filter development due to polarization and incident angle insensitivity. They also comprise a single nanometer thick metal film, demonstrate good line width, CMOS compatibility, and fine color tunability. However, the low transmittance of the coaxial hole array based filters limits their use in potential applications such as image sensors and displays. This paper introduces a new method to increase transmittance in coaxial hole array based filters by tuning localized surface plasmons and surface plasmon polaritons. In this method, coaxial holes of small diameters are filled along with a large size coaxial hole array to form a combined filter geometry with optimized parameters in aluminum film using computational techniques. The simulation results will have potential applications in CMOS image sensors, submicron pixel development, microdisplays, and liquid crystal over silicon devices.

Surface Plasmonic Sensors: Sensing Mechanism and Recent Applications

“…Tittl et al [ 286 ] demonstrated an image-based molecular barcoding with a pixelated dielectric metasurface. The image-based sensing technique can resolve absorption fingerprints without the need for spectrometry, frequency scan, or mechanical components, which opens a new way for multi-analyte recognition with fast response [ 286 , 287 , 288 , 289 ]. For the analytes detection, besides the biological and chemical sensing, the operando monitoring electrochemical activity [ 290 , 291 ] is an attractive area for the development of green energy.…”

A High-Sensitivity Methane Sensor with Localized Surface Plasmon Resonance Behavior in an Improved Hexagonal Gold Nanoring Array

“…The main purpose was to improve the RI sensitivity by increasing the coupling area. The coupling between adjacent LSPRs was enhanced under SPP modulation [25]. The RI sensitivity for Structure B and the increase rates relative to Structure A are shown in Table 3.…”

Dichroic Circular Polarizers Based on Plasmonics for Polarization Imaging Applications

“…Firstly, their component nanostructures are usually fabricated from dielectric or metallic films with thicknesses in the range of a few hundred nanometers and are therefore not bulky [ 14 , 15 , 16 , 17 ]. Moreover, the operating wavelengths can be simply tuned by varying the size, spacing, and/or period of the nanostructures [ 8 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 ]. Lastly, metasurface-based optical devices have already been described that have smaller optical loss than existing systems.…”

“…Plasmonic nanostructures were previously introduced as promising candidates for light filtering applications [ 16 , 18 , 19 , 20 , 21 , 22 , 23 , 25 , 26 , 27 , 28 , 29 , 30 , 51 , 54 ]. Plasmonic behavior emerges in two basic situations [ 55 ].…”