“…For the 70-nm thickness single LZO layer, its lower 30 nm is disturbed due to the oxidation of substrate, but its top 30 nm remains good biaxial texture after YBCO deposition. And on NiW substrate, NiWO 4 , NiO and LZO layers are detected in sequence [15]. Here 70 nm thick LZO films with good biaxial texture are obtained by MOD, but NiWO 4 and NiO phases are detected on the surface of the samples after annealing in oxidation atmosphere.…”