Transmission Characteristics of Metal Films with Periodically Arrayed Micro-Nano Structures

Xue, 秦雪 Qin; Yan, 王燕 Wang; Xiaona, 阎晓娜 Yan; Huifang, 张惠芳 Zhang; Ying, 何英 He

doi:10.3788/lop54.083101

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“…Then, the emergence of equivalent film method [11] solved the problem of incidence of electromagnetic wave in any direction. In recent years, precise electromagnetic field solutions, such as moment method [12] , floquet mode analysis [13] and finite difference time domain (FDTD) [14] , have been applied to the analysis and design of metal grids and shown good computational accuracy. The anti-reflection film needs to be coated on the metal grid to enhance the infrared transmittance due to the contradiction between electromagnetic shielding efficiency (SE) and transmittance [15] .…”

Section: Introductionmentioning

confidence: 99%

Design of infrared anti-reflection thin film devices with compatibility of electromagnetic shielding

li,

Xu,

et al. 2024

Speckle 2023: VIII International Conference on Speckle Metrology

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It is contradictory to satisfy the high-performance infrared transmittance and electromagnetic shielding in the optical window. A design method was proposed for high electromagnetic shielding and infrared transmission on a silicon substrate. Based on the equivalent circuit model theory, the equivalent circuit model of the Cu grid was modified. The infrared antireflection film was designed to further improve the infrared transmittance of the silicon-based grid. The overall transmittance of antireflection film devices compatible with electromagnetic shielding is discussed. The Cu grid was fabricated by photolithography mask and thermal evaporation deposition technology. The results show that the modified LZ equivalent circuit model can more accurately calculate the low-frequency shielding efficiency of metal grids. The simulation shows that the grid linewidth is more likely to affect the electromagnetic shielding effectiveness than the period, and the precise structure is conducive to higher electromagnetic shielding efficiency. Considering the refractive index, stress matching and convenient preparation of the film, the film system was finally selected as Sub/HL/Air (H: ZnSe, L: BaF2), and the design center wavelength was 3514 nm. The average transmittance of the silicon-based grid (g=550 μm, 2a=50 μm) double-sided coated with the same anti-reflection film system is 81.7 % in the 3-5 μm, which is 36.2 % higher than that of the silicon-based grid (45.5 %), with the average electromagnetic shielding efficiency unchanged ( SEavg = 24.

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