2015
DOI: 10.9714/psac.2015.17.3.009
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Transition temperatures and upper critical fields of NbN thin films fabricated at room temperature

Abstract: NbN thin films were deposited on thermally oxidized Si substrate at room temperature by using reactive magnetron sputtering in an Ar-N 2 gas mixture. Total sputtering gas pressure was fixed while varying N 2 flow rate from 1.4 sccm to 2.9 sccm. X-ray diffraction pattern analysis revealed dominant NbN(200) orientation in the low N 2 flow rate but emerging of (111) orientation with diminishing (200) orientation at higher flow rate. The dependences of the superconducting properties on the N 2 gas flow rate were i… Show more

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Cited by 4 publications
(3 citation statements)
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References 11 publications
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“…Except those peaks, no other discernable peak was observed in all samples. NbN (200) and (111) peaks used to be detected at 41 and 35, and (110) peak of -Fe used to exist at around 44 when polycrystalline phases were formed [13,14]. The present results of the XRD scans state that all NbN and FeN layers prepared with the current deposition conditions are amorphous in phase.…”
Section: Methodsmentioning
confidence: 57%
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“…Except those peaks, no other discernable peak was observed in all samples. NbN (200) and (111) peaks used to be detected at 41 and 35, and (110) peak of -Fe used to exist at around 44 when polycrystalline phases were formed [13,14]. The present results of the XRD scans state that all NbN and FeN layers prepared with the current deposition conditions are amorphous in phase.…”
Section: Methodsmentioning
confidence: 57%
“…In general, the effects of boundary scattering and reduced dimensionality compared to the superconducting coherence length cause T c to fall with decreasing d s . For a reference, the Ginzburg-Landau coherence length at 0 K estimated from the upper critical field was ~4.5 nm for similarly prepared NbN films [13]. The largest T c suppression has been observed in the F/S/F structure for a given d s .…”
Section: Methodsmentioning
confidence: 95%
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