Transition metal carbide nanocomposite and amorphous thin films

Abstract

The cover image shows a high resolution transmission electron microscopy image of a nanocomposite structure consisting of crystalline titanium carbide grains in an amorphous matrix of silicon and carbon. On the backside part of a selected area electron diffraction pattern from the same film is also seen.© Olof Tengstrand 2014 ISBN: 978-91-7519-398-4 ISSN: 0345-7524 Printed by LiU-Tryck Linköping, Sweden, 2014 i AbstractThis thesis explores thin films of binary and ternary transition metal carbides, in the Nb-C, Ti-Si-C, Nb-Si-C, Zr-Si-C, and Nb-Ge-C systems. The electrical and mechanical properties of these systems are affected by their structure and here both nanocomposite and amorphous thin films are thus investigated. By appropriate choice of transition metal and composition the films can be designed to be multifunctional with a combination of properties, such as low electric resistivity, low contact resistance and high mechanical strength. Electrical contacts are one example of application that has been of special interest in this thesis. Since some industrially important substrates used in electrical contacts soften at higher temperature, all films were deposited with dc magnetron sputtering at a low substrate temperature (200-350 °C).I show that the electrical resistivity and mechanical properties of composites consisting of nanocrystalline NbC grains (nc-NbC) in a matrix of amorphous C (a-C) depend strongly on the amount of amorphous C. The best combination of hardness (23 GPa) and electrical resistivity (260 µΩ*cm) are found in films with ~15 at.% a-C phase. This is a higher hardness and lower resistivity than measured for the more well studied Ti-C system if deposited under similar conditions. The better results can be explained by a thinner matrix of amorphous C phase in the case of NbC. The nc-NbC/a-C is therefore interesting as a material in electrical contacts.Si can be added to further control the structure and thereby the properties of binary Me-C systems. There are however, different opinions in the literature of whether Si is incorporated on the Ti or C site in the cubic NaCl (B1) structure of TiC. In order to understand how Si is incorporated in a Me-Si-C material I use a model system of epitaxial TiC x (x ~0.7). In this model system a few atomic percent of Si can be incorporated in the cubic TiC structure. The experimental results together with theoretical stability calculations suggest that the Si is positioned at the C sites forming Ti(Si,C) x . The calculation further shows a strong tendency for Si segregation, which is seen at higher Si contents in the experiments, where Si starts segregate out from the TiC x to the grain boundaries causing a loss of epitaxy.If Si is added to an Nb-C nanocomposite, it hinders the grain growth and thus a reduced size of the NbC grains is observed. The Si segregates to the amorphous matrix forming a-SiC. At the same time the resistivity increases and the hardness is reduced. With even higher amounts of Si (>25 at.%) into the Nb-Si-C material, grain gr...