2023
DOI: 10.1088/1674-1056/ac7f94
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Transition-edge sensors using Mo/Au/Au tri-layer films

Abstract: The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transition-edge sensors. Here, we developed these transition-edge sensors using Mo/Au/Au tri-layer films to detect soft X-rays. They were equipped with an overhanging photon absorber. We reduced the fabrication complexity by integrating the sensor patterning with the tri-layer film formation. We determined the electro-thermal parameters of the sensors through a series of resistance vs. temperature and curr… Show more

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Cited by 2 publications
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“…[5] TES fabrication process can be simplified by integrating the sensor patterning with the deposition of Mo/Au/Au trilayer films, and ∆E of 6.66 eV@5.9 keV is reported. [6] A 4 × 4 Mo/Cu TES array integrated with a 2.4-µm-thick bismuth absorber has been developed for the free-electron laser facility around ShanghaiTech University, which shows a quantum efficiency of 70% and ∆E of 5.2 eV at 5.9 keV. [7] In addition, the data acquisition and processing are also crucial for obtaining better ∆E.…”
Section: Introductionmentioning
confidence: 99%
“…[5] TES fabrication process can be simplified by integrating the sensor patterning with the deposition of Mo/Au/Au trilayer films, and ∆E of 6.66 eV@5.9 keV is reported. [6] A 4 × 4 Mo/Cu TES array integrated with a 2.4-µm-thick bismuth absorber has been developed for the free-electron laser facility around ShanghaiTech University, which shows a quantum efficiency of 70% and ∆E of 5.2 eV at 5.9 keV. [7] In addition, the data acquisition and processing are also crucial for obtaining better ∆E.…”
Section: Introductionmentioning
confidence: 99%