Transient calorimetric diagnostics for plasma processing

Bornholdt, S.; Kersten, Holger

doi:10.1140/epjd/e2013-40148-8

Cited by 25 publications

(13 citation statements)

References 39 publications

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“…Details of the measurement procedure for acquiring the T − t characteristics are given by Bornholdt et al [20]. A typical T − t plot is shown in Figure 4.…”

Section: The Transient Calorimetric Probementioning

confidence: 99%

“…After the voltage sweep the plasma was turned off and the probe cooled down for 300 s. During the combined plasma-on and off periods the probe temperature characteristics (T − t) were recorded by the calorimetric probe electronics. Details of the measurement procedure for acquiring the T − t characteristics are given by Bornholdt et al [20]. A typical T − t plot is shown in Figure 4.…”

Section: The Transient Calorimetric Probementioning

confidence: 99%

“…In this work we have therefore carried out measurements of n e and T e for different process gases (Ne, Ar, and Kr) in magnetron sputtering of titanium (Ti) using a combined Langmuir and calorimetric probe, which was recently developed [20]. The results have been compared with the energy flux, which was monitored simultaneously, in order to investigate the total energy influx as well as the different contributions from charge carriers, neutrals and surface processes.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

Haase

Lundin

Bornholdt

et al. 2015

Contrib. Plasma Phys.

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In this work we have investigated the effect of increasing the electron energy as a way to increase the ionization probability of the sputtered metal (Ti) by measuring the impact of three different process gases (Ne, Ar, and Kr). Using a combined Langmuir and calorimetric probe we were able to compare the electron density n e, the electron temperature Te, the total energy influx, as well as the different energy flux contributions from charge carriers, neutrals and surface processes for various discharge conditions. The results show that the electron temperature can be increased by up to a factor of 3 by using Ne instead of Ar (or Kr). Furthermore, it was also found that by using Ne the mean free path for electron impact ionization was decreased by at least 50 %, and for higher pressures even more. In addition, we show that the contributions from sputtered neutrals and film formation represent a large fraction of the total energy influx, whereas the energy flux from ions is very low due to low ne in this type of discharge. However, by investigating changes in the electron energy flux, it was possible to study the effects of using Ne. These results may provide a way to tune the degree of ionization in sputtering processes.

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“…Details of the measurement procedure for acquiring the T − t characteristics are given by Bornholdt et al [20]. A typical T − t plot is shown in Figure 4.…”

Section: The Transient Calorimetric Probementioning

confidence: 99%

Section: The Transient Calorimetric Probementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

Haase

Lundin

Bornholdt

et al. 2015

Contrib. Plasma Phys.

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“…First, we explain the well-known linear and exponential methods [4,[9][10][11] and the underlying assumptions in detail, before we show for a typical measurement why these methods are not suitable for energy influxes in the order of 100 W/ cm 2 . Finally, we introduce a novel method by combining the linear and the exponential methods and show that this approach is suitable for the analysis of high energy influxes by a passive calorimetric probe.…”

Section: Introductionmentioning

confidence: 99%

Analysis of passive calorimetric probe measurements at high energy influxes

2017

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High energy influxes increase the complexity of passive calorimetric probe measurements because of an increasing temperature of the surrounding materials like the probe holder. This leads to a distinctively different evolution of the probe temperature compared to low energy influxes. Different established methods for the analysis of passive calorimetric probe data are presented and it is shown that they are not applicable for high energy influx measurements resulting in the requirement of a novel analysis approach. Such an approach is given in this paper by the combination of the exponential and the linear method. The high energy influx measurements are studied for a commercial atmospheric pressure plasma jet, in order to illustrate our suggested modified approach.

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“…Furthermore, Bornholdt et al used a transient method for measurements with a passive thermal probe [13]. In addition, Ellmer et al investigated a method for calibrating their calorimetric sensor by charged particles emitted from the plasma [14].…”

Section: Introductionmentioning

confidence: 99%

Energy influx measurements with an active thermal probe in plasma-technological processes

Wiese¹,

Kersten²,

Wiese

et al. 2015

EPJ Tech Instrum

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Many plasma-technological applications are based on plasma wall interaction, which can be characterised by calorimetric probes to measure the energy influx from the plasma to the substrate surface. Passive probes are based on the principle of recording the temperature course during heating and cooling of the probe for calculating the energy influx. The disadvantages of these probes are that the energy influx has to be interrupted by switching off the energy source or by using suitable apertures and by the necessity of knowing the exact heat capacity of the probe. A continuously operating active probe is, therefore, developed which does not need to be calibrated and which compensates the environmental effects as well as the heat conduction by the probe holder. By means of controlled electrical heating the probe is set to a given working temperature and then the energy supply supporting the fixed operating temperature is measured. The energy influx by the plasma is compensated by decreasing the heating power and is directly displayed in J/cm 2 s. Some practical measurements are presented. Even, if the probe is designed as double probe the directionality of the energy influx can be determined.

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Transient calorimetric diagnostics for plasma processing

Cited by 25 publications

References 39 publications

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

On the Impact of Electron Temperature in Magnetron Sputtering Benchmarked with Energy Flux Measurements

Analysis of passive calorimetric probe measurements at high energy influxes

Energy influx measurements with an active thermal probe in plasma-technological processes

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