Trace-gas Spectroscopy of Methane using a Monolithically Integrated Silicon Photonic Chip Sensor

Zhang, Eric; Martin, Yves; Orcutt, Jason S.; Xiong, Chi; Glodde, Martin; Barwicz, Tymon; Schares, Laurent; Duch, Elizabeth A.; Marchack, Nathan; Teng, Chu C.; Wysocki, Gerard; Green, William M. J.

doi:10.1364/cleo_si.2019.sth1f.2

Cited by 6 publications

(9 citation statements)

References 2 publications

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“…Spectral information can be used for sensing of materials and identification of chemical composition. [163][164][165][166][167][168][169][170] A recent review has been made to summarize the research progress toward compact spectral imaging and spectral LiDAR sensors. [104] Spectral LiDAR has been applied for environment monitoring [4,5,171] and shows potential to be applied in autonomous driving.…”

Section: Discussionmentioning

confidence: 99%

A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

Xue

et al. 2022

Laser & Photonics Reviews

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Light detection and ranging (LiDAR) sensors enable precision sensing of an object in 3D. LiDAR technology is widely used in metrology, environment monitoring, archaeology, and robotics. It also shows high potential to be applied in autonomous driving. In traditional LiDAR sensors, mechanical rotator is used for optical beam scanning, which brings about limitations on their reliability, size, and cost. These limitations can be overcome by a more compact solid‐state solution. Solid‐state LiDAR sensors are commonly categorized into the following three types: flash‐based LiDAR, microelectromechanical system (MEMS)‐based LiDAR, and optical phased array (OPA)‐based LiDAR. Furthermore, advanced optics technology enables novel nanophotonics‐based devices with high potential and superior advantages to be utilized in a LiDAR sensor. In this review, LiDAR sensor principles are introduced, including three commonly used sensing schemes: pulsed time of flight (TOF), amplitude‐modulated continuous wave TOF, and frequency‐modulated continuous wave. Recent advances in conventional solid‐state LiDAR sensors are summarized and presented, including flash‐based LiDAR, MEMS‐based LiDAR, and OPA‐based LiDAR. The recent progress on emerging nanophotonics‐based LiDAR sensors is also covered. A summary is made and the future outlook on advanced LiDAR sensors is provided.

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Section: Discussionmentioning

confidence: 99%

A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

Xue

et al. 2022

Laser & Photonics Reviews

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“…As a concluding note, a second-generation integrated photonic chip sensor is currently under development [31,36] based on evanescent waveguide TDLAS of ambient CH 4 [18,27]. Full integration of the source, detector, and sensing components on a single chip [50,51,52,53] will provide the same functionality of our free-space optical sensor, with the added benefit of miniaturization for superior SWaP-C performance. We envision the scalable nature of our integrated TDLAS sensing platform to enable a new generation of optical sensor networks for real-time, wide-area monitoring of trace-gas analytes.…”

Section: Discussionmentioning

confidence: 99%

Field Deployment of a Portable Optical Spectrometer for Methane Fugitive Emissions Monitoring on Oil and Gas Well Pads

Zhang

Teng

Kessel

et al. 2019

Sensors

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We present field deployment results of a portable optical absorption spectrometer for localization and quantification of fugitive methane (CH4) emissions. Our near-infrared sensor targets the 2ν3 R(4) CH4 transition at 6057.1 cm−1 (1651 nm) via line-scanned tunable diode-laser absorption spectroscopy (TDLAS), with Allan deviation analysis yielding a normalized 2.0 ppmv∙Hz−1/2 sensitivity (4.5 × 10−6 Hz−1/2 noise-equivalent absorption) over 5 cm open-path length. Controlled CH4 leak experiments are performed at the METEC CSU engineering facility, where concurrent deployment of our TDLAS and a customized volatile organic compound (VOC) sensor demonstrates good linear correlation (R2 = 0.74) over high-flow (>60 SCFH) CH4 releases spanning 4.4 h. In conjunction with simultaneous wind velocity measurements, the leak angle-of-arrival (AOA) is ascertained via correlation of CH4 concentration and wind angle, demonstrating the efficacy of single-sensor line-of-sight (LOS) determination of leak sources. Source magnitude estimation based on a Gaussian plume model is demonstrated, with good correspondence (R2 = 0.74) between calculated and measured release rates.

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“…(d) Monolithic integration of a PbTe detector, coupled with a spiral waveguide (reproduced with permission from [156]). (e) Prototype of a fully integrated silicon photonic sensor with laser, waveguide, and detector for sensing in the near-infrared (reproduced with permission from [157]). (f) Quantum cascade laser and detector, integrated with a dielectric-loaded plasmonic waveguide for sensing in the mid-infrared (copyright © 2021, the author(s) [153]).…”

Section: Passive Waveguide and Detector Integrationmentioning

confidence: 99%

Integrated Nanophotonic Waveguide-Based Devices for IR and Raman Gas Spectroscopy

Alberti

Datta

Jágerská

2021

Sensors

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On-chip devices for absorption spectroscopy and Raman spectroscopy have been developing rapidly in the last few years, triggered by the growing availability of compact and affordable tunable lasers, detectors, and on-chip spectrometers. Material processing that is compatible with mass production has been proven to be capable of long low-loss waveguides of sophisticated designs, which are indispensable for high-light–analyte interactions. Sensitivity and selectivity have been further improved by the development of sorbent cladding. In this review, we discuss the latest advances and challenges in the field of waveguide-enhanced Raman spectroscopy (WERS) and waveguide infrared absorption spectroscopy (WIRAS). The development of integrated light sources and detectors toward miniaturization will be presented, together with the recent advances on waveguides and cladding to improve sensitivity. The latest reports on gas-sensing applications and main configurations for WERS and WIRAS will be described, and the most relevant figures of merit and limitations of different sensor realizations summarized.

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Trace-gas Spectroscopy of Methane using a Monolithically Integrated Silicon Photonic Chip Sensor

Cited by 6 publications

References 2 publications

A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

Field Deployment of a Portable Optical Spectrometer for Methane Fugitive Emissions Monitoring on Oil and Gas Well Pads

Integrated Nanophotonic Waveguide-Based Devices for IR and Raman Gas Spectroscopy

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