Towards universal plasma-enabled platform for the advanced nanofabrication: plasma physics level approach

Baranov, Oleg; Xu, Shuyan; Ostrikov, K.; Wang, Biben; Cvelbar, Uroš; Bazaka, Kateryna; Levchenko, Igor

doi:10.1007/s41614-018-0016-7

Cited by 31 publications

(25 citation statements)

References 149 publications

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“…It can also potentially provide the means for in situ functionalization of vertically aligned graphene networks that have been fabricated from essential oils using the same plasma set-up [50,51] to improve their properties for such applications as sensing and energy storage. Indeed, there is a large range of materials that can be fabricated using plasma-enabled techniques [52,53,54], with an equally broad range of potential applications spanning medicine, electronics, energy and other fields [55,56,57,58].…”

Section: Resultsmentioning

confidence: 99%

Electrically Insulating Plasma Polymer/ZnO Composite Films

et al. 2019

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In this report, the electrical properties of plasma polymer films functionalized with ZnO nanoparticles were investigated with respect to their potential applications in biomaterials and microelectronics fields. The nanocomposite films were produced using a single-step method that combines simultaneous plasma polymerization of renewable geranium essential oil with thermal decomposition of zinc acetylacetonate Zn(acac)2. The input power used for the deposition of composites were 10 W and 50 W, and the resulting composite structures were abbreviated as Zn/Ge 10 W and Zn/Ge 50 W, respectively. The electrical properties of pristine polymers and Zn/polymer composite films were studied in metal–insulator–metal structures. At a quantity of ZnO of around ~1%, it was found that ZnO had a small influence on the capacitance and dielectric constants of thus-fabricated films. The dielectric constant of films with smaller-sized nanoparticles exhibited the highest value, whereas, with the increase in ZnO particle size, the dielectric constant decreases. The conductivity of the composites was calculated to be in the in the range of 10−14–10−15 Ω−1 m−1, significantly greater than that for the pristine polymer, the latter estimated to be in the range of 10−16–10−17 Ω−1 m−1.

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Section: Resultsmentioning

confidence: 99%

Electrically Insulating Plasma Polymer/ZnO Composite Films

et al. 2019

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“…For the development of complex structures, a combination of multiple plasma technologies within a single processing environment may be beneficial, as it may provide considerable savings in terms of time, energy, and cost of processing, and possibly greater efficiency and resolution. Baranov et al [ 20 ] gave an example of one such ‘universal’ platform for plasma processing at low pressures, where the benefits of remaining within a single environment would deliver the most considerable savings with respect to time needed to bring the chamber to the needed level of vacuum multiple times. The proposed platform incorporated several plasma sources that could produce carbon and metallic plasmas, namely vacuum arc, RF, helicon and magnetron plasma sources, and a selection of magnetic coils to control the flux of energy and matter toward the surface, enhance efficiency through plasma confinement, and enhance control over species selectivity.…”

Section: Plasma For Layered and Hierarchical Structures Of Polymersmentioning

confidence: 99%

“…In addition to changing the behavior of biological objects, plasma-enhanced technologies are used extensively in materials processing and engineering [ 11 , 12 , 13 , 14 ], where plasma-generated species can act as catalysts in material degradation, as building blocks in material assembly, and as modifiers of surface properties. While in material engineering the ability to control the directional flow of plasma-generated species is primarily used to deliver precise quantities of species to the surface of materials to induce desired material assembly and/or modification, in aerospace engineering [ 15 , 16 , 17 , 18 , 19 , 20 , 21 ], devices such as plasma thrusters use a combination of electric and magnetic fields to accelerate and expel plasma at high velocity, producing thrust for satellites [ 22 , 23 , 24 ]. In each of these examples, from medicine to space propulsion, the interactions that take place when plasma-generated particles and effects come into contact with matter play a critical role in defining process efficiency and selectivity of the effects that are being induced in this matter.…”

Section: Introductionmentioning

confidence: 99%

Plasma and Polymers: Recent Progress and Trends

Levchenko

Baranov

et al. 2021

Molecules

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Plasma-enhanced synthesis and modification of polymers is a field that continues to expand and become increasingly more sophisticated. The highly reactive processing environments afforded by the inherently dynamic nature of plasma media are often superior to ambient or thermal environments, offering substantial advantages over other processing methods. The fluxes of energy and matter toward the surface enable rapid and efficient processing, whereas the charged nature of plasma-generated particles provides a means for their control. The range of materials that can be treated by plasmas is incredibly broad, spanning pure polymers, polymer-metal, polymer-wood, polymer-nanocarbon composites, and others. In this review, we briefly outline some of the recent examples of the state-of-the-art in the plasma-based polymer treatment and functionalization techniques.

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“…Transformation of the cathode into the plasma-containing vessel additionally increases the plasma density by changing the discharge to the hollow cathode discharge with the electrostatic [55] and magnetic [56] confinement of the charged particles. Here, density of the electrons emitted from the cathode surface n h0 , ionization rate K iz , density of the background gas n a , the magnetic field B directed along the walls of the reactor, the diffusion coefficient D a , and size of the vessel L are related to the plasma density as [57]:…”

Section: Why Plasma?mentioning

confidence: 99%

Plasma meets metamaterials: Three ways to advance space micropropulsion systems

Levchenko

Cherkun

et al. 2020

Advances in Physics: X

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Plasma and metamaterials: what new advances in space micro-propulsion systems can they bring when used together? The aim of this concise review article is to attract attention of the space propulsion scientists and engineers, along with experts working in the fields of micromachines, optics, communication, and other hi-tech devices, to the opportunities that arise from different possible combinations of plasma and metamaterials. Along with plasma-based techniques used for the fabrication of complex metamaterials, we examine two unusual plasma/ metamaterial systems, namely when plasma interacts with a metamaterial, and when plasma itself features some properties of a metamaterial. The fundamental physics behind the principal processes that define the behavior of these systems is briefly outlined. Possible applications in space technology, mainly for micro-propulsion systems for Cubesats and small satellites are also sketched.

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Towards universal plasma-enabled platform for the advanced nanofabrication: plasma physics level approach

Cited by 31 publications

References 149 publications

Electrically Insulating Plasma Polymer/ZnO Composite Films

Electrically Insulating Plasma Polymer/ZnO Composite Films

Plasma and Polymers: Recent Progress and Trends

Plasma meets metamaterials: Three ways to advance space micropropulsion systems

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