Towards Ultra-High Q Microresonators in High-Index Contrast AlGaAs-On-Insulator

Pu, Minhao; Kamel, A. N.; Stassen, Erik; Zheng, Yi; Ottaviano, Luisa; Semenova, Elizaveta; Yvind, Kresten

doi:10.1364/cleo_si.2017.sm1n.3

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2022

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“…The localized residue in the coupling gap may induce detrimental effects such as scattering loss [28], excitation of other transverse modes [75], and counterpropagating mode [76]. Though significant over-etching can remove the gap residue, it induces extra sidewall roughness [77] which may cause more scattering loss. A more practical approach would be to widen the coupling gap to reduce the lag effect, avoiding the gap residue, as shown in Fig.…”

Section: Dry Etchingmentioning

confidence: 99%

Design and Fabrication of AlGaAs-on-Insulator Microring Resonators for Nonlinear Photonics

Kim

Zheng

et al. 2022

IEEE J. Select. Topics Quantum Electron.

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