Towards process control by detecting acoustic emissions during ultrashort pulsed laser ablation of multilayer materials
Christian Lutz,
Ryan Sommerhuber,
Matthias Kettner
et al.
Abstract:We report on process sensing using a membrane-free optical microphone to monitor the acoustic emission during ultrashort pulsed laser ablation of multilayer materials. The acoustic emission during ablation is used to detect material transitions, with the specific signatures allowing to create a reliable process control for identifying individual layers. The outstanding properties of membrane-free optical microphones in terms of high bandwidth and high temporal resolution are ideally qualified for characterizin… Show more
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