Towards Integrated Resonant and Interferometric Sensors in Polymer Films

Xiao, Yanfen; Pichler, Elke; Hofmann, Martin; Bethmann, Konrad; Köhring, Michael; Willer, Ulrike; Zappe, Hans

doi:10.1016/j.protcy.2014.09.040

Cited by 16 publications

(8 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Fabrication of integrated MRRs has been described in the case of all three main IO main platforms, especially SOI [10,13,14] but also InP [15] and Si 3 N 4 [12,16,17] while realization was also reported for polymer systems [18,19]. The SOI platform offers a large refractive index contrast and therewith a small allowable bend radius and thus footprint.…”

Section: Introductionmentioning

confidence: 99%

Performance of Arrayed Microring Resonator Sensors with the TriPleX Platform

GAJ¹,

RG²

2016

J Biosens Bioelectron

View full text Add to dashboard Cite

Integrated-optical (bio) chemical sensors are more and more commercialized, mainly because of their high intrinsic sensitivity in combination with the possibilities they offer for integration in optofluidic devices. The microring resonator (MRR), for example, is a very feasible structure to be used as microarray sensor element for multiplex biosensing. Fabrication of MRRs has been described in the case of the TriPleX platform employing well-defined stacks of stoichiometric Si 3 N 4 and SiO 2 material. This platform allows for a wide variety of applications, due to its intrinsic low loss and its transparency for the VIS/NIR wavelength range. In the present paper, we describe the recent achievements in the characterization of arrays of these MRRs regarding temperature sensitivity, refractive index sensitivity and protein immobilization performance. Furthermore, the use of a reference channel/reference MRR is demonstrated in order to show the advantage of compensation of unintended change in temperature or sample composition. The refractive index sensitivity was determined to be 104 nm/RIU and the limit of detection was about 2 × 10 -6 RIU. MRRs appeared to behave very comparable (expressed as the coefficient of (intra-array) variation (CV)) regarding the response to temperature (CV≈0.3%) as well as refractive index (CV<0.1%). Furthermore, it is shown that protein immobilization onto the different MRRs of the same arrays can be realized in a comparable way (CV<3%). A good comparability (i.e., a low variation) in these aspects allows for the use of internal referencing in order to compensate for unintended change in temperature or refractive index and also helps to attain a high assay precision in the ultimate biosensing application. Ongoing research is focused on the integration of more functionality on chip and further miniaturization in order to allow for fabrication of complex, though affordable, sensor devices.

show abstract

Section: Introductionmentioning

confidence: 99%

Performance of Arrayed Microring Resonator Sensors with the TriPleX Platform

GAJ¹,

RG²

2016

J Biosens Bioelectron

View full text Add to dashboard Cite

show abstract

“…The S-bend geometry discussed in one of these studies [105] was investigated for the inverted rib waveguide geometry used in this thesis [86]. Two S-bend path functions…”

Section: Design Considerations For Bent Waveguidesmentioning

confidence: 99%

Optical temperature sensing on flexible polymer foils

et al. 2016

Self Cite

View full text Add to dashboard Cite

“…This means that these sensor systems are fully integrated networks of light sources, detectors and sensors, connected by optical waveguides on thin polymer films. Measured quantities in POS are, for example, chemical concentrations [2], temperature [3] or strain [4], which enables that the utilization of the sensor systems is carried out in, e.g., structural health monitoring, and chemical analysis. As stated before, measuring such quantities over an area enables a wide range of novel applications for such sensor systems.…”

Section: Introductionmentioning

confidence: 99%