Towards High Coupling Efficiency Integrated 2D Meta-surface Waveguide Coupler for Mid-IR Wavelengths

High coupling efficiency 2D metasurface integrated with strip waveguide in SOI for mid‐IR wavelengths

“…In this paper, we present the design of 2D metasurface integrated with a strip waveguide to couple off-chip, out-of-plane, 3.8 μm wavelength into on-chip, in-plane waveguide [24]. Metasurface and strip waveguide integration have been achieved using 400 nm thick SOI material system, which we have previously employed to demonstrate low-loss waveguides for the 3.8 μm wavelength [25].…”