Towards an ideal high-κ HfO₂–ZrO₂-based dielectric

Abstract

The existence of morphotropic phase boundary (MPB) inside HfO2-ZrO2 solid solution thin films has been predicted; if it exists, it provides up a new path toward an ideal silicon-compatible dielectric....

Hafnium Oxide (HfO2) – A Multifunctional Oxide: A Review on the Prospect and Challenges of Hafnium Oxide in Resistive Switching and Ferroelectric Memories

“…[279] Indeed, a relatively large electronic bandgap E G combined with a high ε r gives elbow room to creative researchers toward the fabrication of ideal high-κ devices (Figure 3). [280][281][282][283] HfO 2 -based ultrathin films solved the scaling issues, and since 2007, INTEL group has practically used this material as a new high-κ for commercial production of the latest microprocessors. [279] To enhance the scaling ability of the emerging devices, improving the dielectric properties of HfO 2 -based thin film has always been on demand.…”

“…A novel approach based on the existence of morphotropic phase boundaries (MPB) was recently developed. [281,283,[292][293][294][295] This approach introduced a substantial improvement in the dielectric properties of HfO 2 -based thin films. In fact, the discovery of ferroelectricity and anti-ferroelectricity in HfO 2 -ZrO 2 (HZO) solid solution thin films [246][247][248][249][250][251][252][253][254][255][256][257][258][259][260][261][262] paved the way for enhancing dielectric properties through MPB, which will be discussed later in Section 8.…”

“…Recently, Kashir et al [281,283] investigated the coexistence of o-HZO and t-ZrO 2 phases by fabrication of a 10-nm FE Zr-doped HfO 2 AFE ZrO 2 nano-laminated thin film. The coexistence of t-and o-phases were clearly shown by structural analysis.…”

“…[ 384 ] Copyright 2021, AIP (the blue and red spheres indicate the Hf and O atoms, respectively) and b) Huan et al Reproduced with permission. [ 283 ] Copyright 2021, APS (the yellow and red spheres indicate the Hf and O atoms, respectively).…”

“…Polarization switching pathway in o-phase; Minimum energy pathways between the up and down states of the polar o-phase (Pca2 1 ) calculated by a) Clima et al Reproduced with permission [384]. Copyright 2021, AIP (the blue and red spheres indicate the Hf and O atoms, respectively) and b) Huan et al Reproduced with permission [283]. Copyright 2021, APS (the yellow and red spheres indicate the Hf and O atoms, respectively).…”