Abstract-Activities for the comprehension and development of Cyber-Physical Systems (CPS) include analysis of multiple disciplines including mechanical engineering, electronic engineering, systems engineering and computer science. This work presents a comprehensive and applicable methodology for the initial activities of the development process of CPS. This methodology displays the capacity to describe and enable detailed analysis of the relevant properties of these systems as, for example, time specification, resources, communication and non-functional properties of CPS. In this research, two consolidated approaches of Model-Based Engineering are used in a combined way for proposing a methodology for requirements analysis, modeling and formal specification of CPS. Initially, a strategy for the definition, modeling, specification, and categorization of requirements in a tabular way is proposed. From the system definition in a high abstraction level, the SysML Requirements diagram is extended by using UML profile MARTE/VSL for formalization of restrictions, annotations and stereotypes in the model. Initial results of the application of the proposed methodology are presented by means of a case study of the Industrial Packing System.