2019
DOI: 10.1039/c8fd00126j
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Towards a 3D GeSbTe phase change memory with integrated selector by non-aqueous electrodeposition

Abstract: The design and fabrication of a 2D passive phase change memory matrix by non-aqueous electrodeposition of confined Ge–Sb–Te cells.

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Cited by 15 publications
(24 citation statements)
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“…[ 13 ] It can hence be utilized to deposit materials over 3D surfaces including patterned nanostructures of high aspect ratios. [ 14–17 ] In addition, electrodeposition is usually performed at room temperature, avoiding harsh environments such as plasma or extremely high temperatures, which can damage pre‐existing materials on the substrate, such as graphene electrodes. [ 7 ]…”
Section: Introductionmentioning
confidence: 99%
“…[ 13 ] It can hence be utilized to deposit materials over 3D surfaces including patterned nanostructures of high aspect ratios. [ 14–17 ] In addition, electrodeposition is usually performed at room temperature, avoiding harsh environments such as plasma or extremely high temperatures, which can damage pre‐existing materials on the substrate, such as graphene electrodes. [ 7 ]…”
Section: Introductionmentioning
confidence: 99%
“…Electrodeposition in nonaqueous solvents using a three-electrode electrodeposition setup is an alternative to overcome these limitations. 24,[38][39][40] A commercially available precursor for electrodeposition is [NH4]2[MoS4]. However, this precursor is not compatible with non-aqueous solvents such as dichloromethane (CH2Cl2) or acetonitrile (CH3CN).…”
Section: Introductionmentioning
confidence: 99%
“…By referring to this method, the fitting of MOSFET parameters under other processes can be realized. The HRS and LRS of the eNVM device used in the simulation are the typical expected values of GeSbTe-type PCRAM [34,35], and the resistance values of other eNVM devices can be set when needed. It should be noted that the proposed method can only analyze 1T1R crossbar arrays under steady state, and dynamic analysis is beyond the scope of this paper.…”
Section: Conclusion and Discussionmentioning
confidence: 99%