2019
DOI: 10.1109/jlt.2018.2868051
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Toward Highly Reliable, Precise, and Reproducible Fabrication of Photonic Crystal Slabs on Lithium Niobate

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Cited by 7 publications
(7 citation statements)
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“…2(e) and the resonant wavelength is located at 1576 nm. The resonance presents an average spectral slope of 4.96 dB / nm , showing better spectral performances than the 2SBM 39 , as it is a lower frequency mode in addition to be the highest ever reported on LN-PCS 40,4749 .…”
Section: Fabrication and Optical Characterizationmentioning
confidence: 88%
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“…2(e) and the resonant wavelength is located at 1576 nm. The resonance presents an average spectral slope of 4.96 dB / nm , showing better spectral performances than the 2SBM 39 , as it is a lower frequency mode in addition to be the highest ever reported on LN-PCS 40,4749 .…”
Section: Fabrication and Optical Characterizationmentioning
confidence: 88%
“…an optical fiber tip. The fabrication of the LN-based PCS is optimized and assessed in a recent paper 39 . However, concerning the integration onto the fiber tip, the fiber may alter the SBMs.…”
Section: Design and Simulationsmentioning
confidence: 99%
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“…Calero et al proposed the redeposition-free FIB etching technique [41] . They noted that the fabrication imperfections during the FIB process are owing to the large hole conicity, thickness erosion, and surface roughness.…”
Section: Fabrication and Characterization Of The Lnphcmentioning
confidence: 99%
“…In this paper, we experimentally demonstrate an LN membrane metasurface showing a strong SHG conversion efficiency up to 2.0 × 10 –4 , which is, to the best of our knowledge, the largest value among all the reported metasurface arrays in the visible and near-infrared range. , Here we manufactured a 210 nm thick freestanding LN membrane using an LNOI wafer, based on which we fabricated the metasurfaces consisting of a square lattice of circular air holes. Such a freestanding scheme has the advantages of increased refractive index contrast in the vertical direction and high fabrication quality, leading to a distinct spectral resonance with a Q-factor of 75 and strong field localization in the LN layer. SHG peaks originating from the pump resonances in the metasurfaces were observed.…”
mentioning
confidence: 99%