Toward extended range sub-micron conoscopic holography profilometers using multiple wavelengths and phase measurement

Enguita, J.M.; Álvarez, Ignacio; Marina, Jorge; Ojea, G.; Cancelas, José A.; Frade, María

doi:10.1117/12.819456

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Extending the Measurement Range: Multiple Wavelength Conosco1

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2009

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“…With this setup, steeps of approximately 3 μ m are correctly resolved, while still retaining precisions well below the micron. The behavior of a prototype of this sensor has been reported in [ 28 , 29 ].…”

Section: Extending the Measurement Range: Multiple Wavelength Conoscomentioning

confidence: 99%

On-Line Metrology with Conoscopic Holography: Beyond Triangulation

Álvarez

Enguita

Frade

et al. 2009

Sensors

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On-line non-contact surface inspection with high precision is still an open problem. Laser triangulation techniques are the most common solution for this kind of systems, but there exist fundamental limitations to their applicability when high precisions, long standoffs or large apertures are needed, and when there are difficult operating conditions. Other methods are, in general, not applicable in hostile environments or inadequate for on-line measurement. In this paper we review the latest research in Conoscopic Holography, an interferometric technique that has been applied successfully in this kind of applications, ranging from submicrometric roughness measurements, to long standoff sensors for surface defect detection in steel at high temperatures.

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Section: Extending the Measurement Range: Multiple Wavelength Conoscomentioning

confidence: 99%