Toward Design and Implementation of Intelligent Manufacturing in Semiconductor Production Industry with Wafer Chamber Faults

Menexis, Antonios N.; Koumboulis, Fotis N.; Fragkoulis, Dimitrios G.; Kouvakas, Nikolaos D.

doi:10.1007/978-981-99-9836-4_21

Frontiers of Artificial Intelligence, Ethics and Multidisciplinary Applications

2024

DOI: 10.1007/978-981-99-9836-4_21

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Toward Design and Implementation of Intelligent Manufacturing in Semiconductor Production Industry with Wafer Chamber Faults

Antonios N. Menexis,

Fotis N. Koumboulis,

Dimitrios G. Fragkoulis

et al.

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Toward Design and Implementation of Intelligent Manufacturing in Semiconductor Production Industry with Wafer Chamber Faults

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References 24 publications

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