Abstract:Nanoimprinting large‐area structures, especially high‐density features like meta lenses, poses challenges in achieving defect‐free nanopatterns. Conventional high‐resolution molds for nanoimprinting are often expensive, typically constructed from inorganic materials such as silicon, nickel (Ni), or quartz. Unfortunately, replicated nanostructures frequently suffer from breakage or a lack of definition during demolding due to the high adhesion and friction at the polymer‐mold interface. Moreover, mold degradati… Show more
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