Toward a Precise Micromanipulation

Gauthier, Micha l; gnier, St phane R

doi:10.1002/9780470634417.ch4

Cited by 3 publications

(2 citation statements)

References 45 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Microgrippers for tissues or cells that require direct mechanical handling need very complex movements and specific materials because biological cells can be damaged during manipulation [16][17][18]. Manipulating micro-objects has some particularities, such as the influence of adhesion force, material structure, vibration, and so on [19,20]. The authors have developed mini and microgrippers with flexure hinges of different shapes and piezoelectric actuators [21,22].…”

Section: Introductionmentioning

confidence: 99%

A New Hybrid Stepper Motor, Compliant Piezoelectric Micro-Tweezer for Extended Stroke

et al. 2023

View full text Add to dashboard Cite

The revolutionary economic potential of micro and nanotechnology is already recognized. Micro and nano-scale technologies that use electrical, magnetic, optical, mechanical, and thermal phenomena separately or in combination are either already in the industrial phase or approaching it. The products of micro and nanotechnology are made of small quantities of material but have high functionality and added value. This paper presents such a product: a system with micro-tweezers for biomedical applications—a micromanipulator with optimized constructive characteristics, including optimal centering, consumption, and minimum size, for handling micro-particles and constructive micro components. The advantage of the proposed structure consists mainly in obtaining a large working area combined with a good working resolution due to the double actuation principle: electromagnetic and piezoelectric.

show abstract

Section: Introductionmentioning

confidence: 99%

A New Hybrid Stepper Motor, Compliant Piezoelectric Micro-Tweezer for Extended Stroke

et al. 2023

View full text Add to dashboard Cite

show abstract

“…The paper describes this approach applied to a gripper. Dafflon et al [19] describe the use of an electrostatic MEMS-based microgripper combined with a capacitive force sensor. Millet et al [20] describe a large stroke polysilicon gripper actuated by 16 scratch drives.…”

Section: Introductionmentioning

confidence: 99%

MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators

Brouwer¹,

Jong²,

Boer³

et al. 2009

J. Micromech. Microeng.

View full text Add to dashboard Cite

In this paper the design, modeling and fabrication of a precision MEMS-based clamp with a relatively large clamping force are presented. The purpose of the clamp is to mechanically fix a six-degree-of-freedom (DOF) MEMS-based sample manipulator (Brouwer et al J. Int. Soc. Precis. Eng. Nanotechnol. submitted) once the sample has been positioned in all DOFs. The clamping force is generated by a rotational electrostatic comb-drive actuator and can be latched passively by a parallel plate type electrostatically driven locking device. The clamp design is based on the principles of exact constraint design, resulting in a high actuation compliance (flexibility) combined with a high suspension stiffness. Therefore, a relatively large blocking force of 1.4 mN in relation to the used area of 1.8 mm 2 is obtained. The fabrication is based on silicon bulk micromachining technology and combines a high-aspect-ratio deep reactive ion etching (DRIE), conformal deposition of low-pressure chemical vapor deposition (LPCVD) silicon nitride and an anisotropic potassium hydroxide (KOH) backside etching technology. Special attention is given to void reduction of Si x N y trench isolation and reduction of heating phenomena during front-side release etching. Guidelines are given for the applied process. Measurements showed that the clamp was able to fix, hold and release a test actuator. The dynamic behavior was in good agreement with the modal analysis.

show abstract

Performance Indices for the Evaluation of Microgrippers Precision in Grasping and Releasing Phases

Ruggeri

Fontana

Legnani

et al. 2019

Int. J. Precis. Eng. Manuf.

View full text Add to dashboard Cite

Toward a Precise Micromanipulation

Cited by 3 publications

References 45 publications

A New Hybrid Stepper Motor, Compliant Piezoelectric Micro-Tweezer for Extended Stroke

A New Hybrid Stepper Motor, Compliant Piezoelectric Micro-Tweezer for Extended Stroke

MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators

Performance Indices for the Evaluation of Microgrippers Precision in Grasping and Releasing Phases

Contact Info

Product

Resources

About