2018
DOI: 10.1021/acsami.8b20284
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Touchpoint-Tailored Ultrasensitive Piezoresistive Pressure Sensors with a Broad Dynamic Response Range and Low Detection Limit

Abstract: Wearable pressure sensors with high sensitivity, broad dynamic response range and low detection limit are highly desirable to enable the applications in electronic skins and soft robotics. In this work, we report a high-performance wearable pressure sensor based on microstructured polydimethylsiloxane (PDMS)/Ag and rough polyimide (PI)/Au interdigital electrodes. By tailoring the touchpoints, the resulting pressure sensors show ultrahigh sensitivity (259.32 kPa -1 ), broad dynamic response range (54 kPa) and l… Show more

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Cited by 107 publications
(75 citation statements)
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“…To break the bottleneck, flexible pressure sensors composed of surface microstructures and conductive layers were proposed, in which the signals were typically generated from the variation of the contact resistance . The transformed working mechanism greatly promoted the sensitivity up to 10–100 kPa −1 (especially in the low pressure range) and decreased the limit of detection (LOD) to 1 Pa or less . Nonetheless, for plenty of microstructure‐based sensors, the response ranges with high sensitivity were limited to several kPa since the contact areas of the microstructures were easily saturated under small pressure.…”
Section: Introductionmentioning
confidence: 99%
“…To break the bottleneck, flexible pressure sensors composed of surface microstructures and conductive layers were proposed, in which the signals were typically generated from the variation of the contact resistance . The transformed working mechanism greatly promoted the sensitivity up to 10–100 kPa −1 (especially in the low pressure range) and decreased the limit of detection (LOD) to 1 Pa or less . Nonetheless, for plenty of microstructure‐based sensors, the response ranges with high sensitivity were limited to several kPa since the contact areas of the microstructures were easily saturated under small pressure.…”
Section: Introductionmentioning
confidence: 99%
“…[ 11–15 ] Among the different kinds of pressure sensors, piezoresistive pressure sensor demonstrates great application potential because of its fast response speed, simple structure, economical fabrication process and great stability. [ 16–20 ] Improvement of sensitivity of pressure sensors is critical for the high precision and ultrasensitive pressure detection, [ 21–25 ] which is however a challenging task because the key effect of device configuration on the sensitivity is always neglected.…”
Section: Figurementioning
confidence: 99%
“…Limit of detection (LOD) is the minimum pressure which a sensor can perceive and respond. [25,49,50] We placed a piece of feather on the sensor to produce an average pressure of 0.425 Pa (Figure 4a), and a clear output current was observed as a response. Response and recovery time are other two key parameters for sensors.…”
Section: Improvement Of Sensitivity Of Electrical Piezoresistive Sensmentioning
confidence: 99%
“…Moreover, the novelty of 3D porous conductive structures increases the infiltration of conductive fillers into skeleton walls, and decreases the distance between cells upon external deformation or compressive strain. This normally results in variation of relative resistance [ 42 , 43 ]. The excellent viscoelastic features and the good porosity of the 3D porous conductive composites generate significantly stable resistance signals over a wide pressure range [ 44 , 45 ].…”
Section: Background Studymentioning
confidence: 99%