Total Ionizing Dose Effects in Piezoelectric MEMS Relays

Proie, Robert M.; Polcawich, Ronald G.; Cress, Cory D.; Sanchez, Luz M.; Grobicki, Alden D.; Pulskamp, Jeffrey S.; Roche, N.

doi:10.1109/tns.2013.2282261

Cited by 22 publications

(9 citation statements)

References 17 publications

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“…The top electrode and PZT layer were patterned using argon ion milling and a series of additional metallization steps to create interconnects to device structures. This general process is outlined elsewhere 40 .…”

Section: Methodsmentioning

confidence: 99%

Phenomenological Model for Defect Interactions in Irradiated Functional Materials

Brewer

Cress

Williams

et al. 2017

Sci Rep

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The ability to tailor the performance of functional materials, such as semiconductors, via careful manipulation of defects has led to extraordinary advances in microelectronics. Functional metal oxides are no exception – protonic-defect-conducting oxides find use in solid oxide fuel cells (SOFCs) and oxygen-deficient high-temperature superconductors are poised for power transmission and magnetic imaging applications. Similarly, the advantageous functional responses in ferroelectric materials that make them attractive for use in microelectromechanical systems (MEMS), logic elements, and environmental energy harvesting, are derived from interactions of defects with other defects (such as domain walls) and with the lattice. Chemical doping has traditionally been employed to study the effects of defects in functional materials, but complications arising from compositional heterogeneity often make interpretation of results difficult. Alternatively, irradiation is a versatile means of evaluating defect interactions while avoiding the complexities of doping. Here, a generalized phenomenological model is developed to quantify defect interactions and compare material performance in functional oxides as a function of radiation dose. The model is demonstrated with historical data from literature on ferroelectrics, and expanded to functional materials for SOFCs, mixed ionic-electronic conductors (MIECs), He-ion implantation, and superconductors. Experimental data is used to study microstructural effects on defect interactions in ferroelectrics.

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Section: Methodsmentioning

confidence: 99%

Phenomenological Model for Defect Interactions in Irradiated Functional Materials

Brewer

Cress

Williams

et al. 2017

Sci Rep

Self Cite

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“…[49][50][51][52] There is potential for MEMS or NEMS (NanoElectroMechanical Systems) switches to replace semiconductor devices for radiation hard logic and memory devices, again for space and nuclear electronic applications. [49][50][51][52] There is potential for MEMS or NEMS (NanoElectroMechanical Systems) switches to replace semiconductor devices for radiation hard logic and memory devices, again for space and nuclear electronic applications.…”

Section: Irradiation Of Ferroelectric Materialsmentioning

confidence: 99%

“…[49][50][51][52] There is potential for MEMS or NEMS (NanoElectroMechanical Systems) switches to replace semiconductor devices for radiation hard logic and memory devices, again for space and nuclear electronic applications. Recent work 51 has shown that PZT (lead zirconate titanate) switches still operate aer exposure to over 11 Mrad(Si) of gamma radiation, although some degradation in the properties of the piezoelectric were observed, again attributed to radiationinduced defects leading to domain pinning and a reduction in piezoelectric strain and dielectric constant, 51 and an increase in coercive eld and remanent polarisation. 51 The problem is exacerbated with the trend to thinner gate dielectrics and reduced size in modern devices.…”

Section: Irradiation Of Ferroelectric Materialsmentioning

confidence: 99%

“…51 The problem is exacerbated with the trend to thinner gate dielectrics and reduced size in modern devices. 52 These studies deal with the effects of X-ray, 50 gamma ray 49,51 and relatively low energy neutron irradiation. The critical factor for MEMS switches in a radiation environment is not the contact mechanism, but the actuation and the performance of the piezoelectric material.…”

Section: Irradiation Of Ferroelectric Materialsmentioning

confidence: 99%

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Ferroelectric materials for fusion energy applications

Cain

Reece

2016

J. Mater. Chem. A

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A power generating fusion reactor will operate under extreme conditions of temperature and high-energy particle fluences. The energy is produced by the nuclear fusion reaction of deuterium and tritium in a plasma, which can reach temperatures of the order of 100 million C. The reaction generates helium, high energy (14 MeV) neutrons and gamma rays. The operation of a fusion reactor requires diagnostic equipment for the monitoring of temperature, pressure, magnetic fields, radiation energy and fluence, and other operational parameters. Functional materials, in particular ferroelectrics, can play many useful roles in these types of measurement. Many ferroelectrics are also known for their radiation hardness, which may favour their use in this environment. This review paper describes the functions where ferroelectrics may find useful application in a reactor, the effects of the reactor environment on materials in general, and the effects on ferroelectrics in particular. Though this review is centered on the technology associated with the Joint European Torus (JET), International Thermo-Nuclear Reactor (ITER) and the future planned DEMOnstration Power Plant (DEMO) fusion reactor types there are some similar materials related issues associated with the many other systems being explored worldwide. Conclusions are then made about the future for ferroelectric materials in fusion reactors and some of the research challenges that need to be addressed. Fig. 5 (a) Hysteresis loop of triglycine sulphate before irradiation. (b) Hysteresis loop after irradiation of a single domain crystal of triglycine sulphate. (c) Hysteresis loop after irradiation of a multidomain crystal of triglycine sulphate (redrawn from ref. 48 with permission from Elsevier). J. Mater. Chem. AThis journal is

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“…However, RF MEMS switches feature moderate switching speeds and cycle lifetimes that are inferior to solid state solutions. A related technology is now emerging, MEMS and NEMS based mechanical logic, for energy-efficient and harsh environment capable digital integrated circuits [2][3][4][5][6][7]. The advantages of such miniature mechanical relay based logic over CMOS technology include the potential for greatly improved energy-per-operation performance, higher temperature operation, and radiation hardness [7].…”

Section: Introductionmentioning

confidence: 99%

Nano- and micro-electromechanical switch dynamics

Pulskamp

Proie

Polcawich

2013

J. Micromech. Microeng.

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This paper reports theoretical analysis and experimental results on the dynamics of piezoelectric MEMS mechanical logic relays. The multiple degree of freedom analytical model, based on modal decomposition, utilizes modal parameters obtained from finite element analysis and an analytical model of piezoelectric actuation. The model accounts for exact device geometry, damping, drive waveform variables, and high electric field piezoelectric nonlinearity. The piezoelectrically excited modal force is calculated directly and provides insight into design optimization for switching speed. The model accurately predicts the propagation delay dependence on actuation voltage of mechanically distinct relay designs. The model explains the observed discrepancies in switching speed of these devices relative to single degree of freedom switching speed models and suggests the strong potential for improved switching speed performance in relays designed for mechanical logic and RF circuits through the exploitation of higher order vibrational modes.

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Total Ionizing Dose Effects in Piezoelectric MEMS Relays

Cited by 22 publications

References 17 publications

Phenomenological Model for Defect Interactions in Irradiated Functional Materials

Phenomenological Model for Defect Interactions in Irradiated Functional Materials

Ferroelectric materials for fusion energy applications

Nano- and micro-electromechanical switch dynamics

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