Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array

Ji, Weiliang; Liu, Lifang; Xing, Zhanqiang; Zhang, Derong; Wang, Yicheng; Chen, Lin; Chen, Yu; Sun, Xiangyu; Du, Yu

doi:10.1109/tuffc.2020.3032988

Cited by 38 publications

(16 citation statements)

References 31 publications

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“…The pMUT reception sensitivity SR is defined as the proportion e31,f /ε33 , whereas the electromechanical coupling coefficient 𝑘 𝑡 2 is proportional to 𝑒 31,𝑓 2 /𝜀 33 , therefore the SR of the ScAlN-based pMUT is about 12 times higher than PZT pMUT, the 𝑡 2 is about twice higher than PZT and AlN pMUTs 19 .…”

Section: Transducer Descriptionmentioning

confidence: 99%

ScAlN film-based piezoelectric micromechanical ultrasonic transducers with dual-ring structure for distance sensing

zhang

Miao

et al. 2022

Preprint

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Piezoelectric micromechanical ultrasonic transducers (pMUTs) are a new type of distance sensors with great potential for applications in automotive, unmanned aerial vehicle, robotics, and smart-home. However, the previously reported pMUT is limited by short sensing distance due to lower output sound pressure. In this work, a pMUT with a special dual-ring structure based on scandium-doped aluminum nitride (ScAlN) is proposed. The combination of a dual-ring structure with pinned boundary conditions and a high piezoelectric performance ScAlN film allows the pMUT to achieve a large dynamic displacement of 2.87 μm/V and a high electromechanical coupling coefficient (k2t) of 8.92%. The results of the ranging experiments show that the proposed pMUT achieves a 6 m distance sensing, the farthest distance sensing up to date registered. This pMUT provides surprisingly fertile ground for various distance sensing applications.

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Section: Transducer Descriptionmentioning

confidence: 99%

ScAlN film-based piezoelectric micromechanical ultrasonic transducers with dual-ring structure for distance sensing

zhang

Miao

et al. 2022

Preprint

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“…PMUTs are Micro-Electro-Mechanical Systems (MEMS)-based piezoelectric ultrasonic transducers generating ultrasonic waves that can propagate in air [ 15 , 16 , 17 , 18 , 19 , 20 ], liquid [ 21 , 22 , 23 ], or solid media [ 24 ]. Piezoelectric materials are used in a wide range of smart micro-systems [ 25 , 26 ].…”

Section: Introductionmentioning

confidence: 99%

PMUTs Arrays for Structural Health Monitoring of Bolted-Joints

et al. 2023

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Micro-electro-mechanical systems (MEMS) have enabled new techniques for the miniaturization of sensors suitable for Structural Health Monitoring (SHM) applications. In this study, MEMS-based sensors, specifically Piezoelectric Micromachined Ultrasonic Transducers (PMUT), are used to evaluate and monitor the pre-tensioning of a bolted joint structural system. For bolted joints to function properly, it is essential to maintain a suitable level of pre-tensioning. In this work, an array of PMUTs attached to the head and to the end of a bolt, serve as transmitter and receiver, respectively, in a pitch-catch Ultrasonic Testing (UT) scenario. The primary objective is to detect the Change in Time of Flight (CTOF) of the acoustic wave generated by the PMUT array and propagating along the bolt’s axis between a non-loaded bolt and a bolt in service. To model the pre-tensioning of bolted joints and the transmission of the acoustic wave to and from a group of PMUTs through the bolt, a set of numerical models is created. The CTOF is found to be linearly related to the amount of pre-tensioning. The numerical model is validated through comparisons with the results of a preliminary experimental campaign.

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“…The vibrating multi-layered system of PMUTs leads to the generation of an ultrasonic wave that can travel inside the domain of interest such as solids or fluids [4][5][6]. The ultrasonic waves emitted can be used in a wide range of industrial applications such as range finding [7,8], finger-printing recognition [9] and ultrasonic imaging [10,11]. The "direct effect" of piezoelectric material, which refers to the generation of an electrical potential difference under the action of a mechanical strain, is used in PMUTs in energy-harvesting applications to obtain energy from external elements that provide freely mechanical energy [12,13].…”

Section: Introductionmentioning

confidence: 99%

Efficient Modeling and Simulation of PMUT Arrays in Various Ambients

et al. 2022

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This paper presents a numerical reduced-order modeling (ROM) approach for complex multi-layered arrays of piezoelectric micromachined ultrasonic transducers (PMUTs). The numerical modeling technique adopted to generate an array of PMUTs consisting of a considerable number of transducers allows for a large reduction in computational cost without reducing accuracy. The modeling idea is based on coupling shell elements applied to the PMUT structural layers with 3D-solid elements applied to the piezoelectric layer. A set of eigenfrequency and frequency domain analyses are presented considering a single ROM of a PMUT performing in different ambients and the performing central frequencies are obtained for every considered scenario. A unique arrangement of 228 PMUTs is presented and tested for its ability to transmit and receive acoustic waves. The operating frequency band of the array and the level of interference and cross-talk among different PMUTs in the near field are estimated. Finally, the results from a preliminary experimental test performed to analyze the acoustic abilities of an 8 × 8 array of PMUTs are presented. A corresponding numerical model is created and the obtained results matched the experimental data, leading to a validation of the modeling technique proposed in this work.

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Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array

Cited by 38 publications

References 31 publications

ScAlN film-based piezoelectric micromechanical ultrasonic transducers with dual-ring structure for distance sensing

ScAlN film-based piezoelectric micromechanical ultrasonic transducers with dual-ring structure for distance sensing

PMUTs Arrays for Structural Health Monitoring of Bolted-Joints

Efficient Modeling and Simulation of PMUT Arrays in Various Ambients

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