Total dose measurement for ion implantation using laser ablation ICP-MS

Li, Fuhe; Balazs, Marjorie K.; Pong, Raymond

doi:10.1039/b001796p

Cited by 10 publications

(5 citation statements)

References 3 publications

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“…In fact, LA in combination with inductively coupled plasma mass spectrometry (ICP-MS) gives rapid access to quantitative depth profiling. [11][12][13] The analytical characterization capability of implanted Si is a relevant issue for many material science applications. Some non-destructive techniques, e.g., X-ray fluorescence (XRF), lack the ability to perform direct depth profiling and are more or less blind to typically implanted doses, which are at the ultra-trace level.…”

Section: Introductionmentioning

confidence: 99%

Overcoming pulse mixing and signal tailing in laser ablation inductively coupled plasma mass spectrometry depth profiling

Bleiner

Belloni²,

Doria³

et al. 2005

J. Anal. At. Spectrom.

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Section: Introductionmentioning

confidence: 99%

Overcoming pulse mixing and signal tailing in laser ablation inductively coupled plasma mass spectrometry depth profiling

Bleiner

Belloni²,

Doria³

et al. 2005

J. Anal. At. Spectrom.

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“…Li et al reported LA-ICP-MS for quantitative analysis of the dopant dose implanted in crystalline silicon wafers [160]. The penetration depths and vertical profiles of four commonly used dopant ions in the semiconductor industry, B, As, Sb, and P, were studied.…”

Section: Film Doping and Depth Profilingmentioning

confidence: 99%

Laser ablation in analytical chemistry—a review

Russo

2002

Talanta

517

335

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Laser ablation is becoming a dominant technology for direct solid sampling in analytical chemistry. Laser ablation refers to the process in which an intense burst of energy delivered by a short laser pulse is used to sample (remove a portion of) a material. The advantages of laser ablation chemical analysis include direct characterization of solids, no chemical procedures for dissolution, reduced risk of contamination or sample loss, analysis of very small samples not separable for solution analysis, and determination of spatial distributions of elemental composition. This review describes recent research to understand and utilize laser ablation for direct solid sampling, with emphasis on sample introduction to an inductively coupled plasma (ICP). Current research related to contemporary experimental systems, calibration and optimization, and fractionation is discussed, with a summary of applications in several areas.

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“…LA holds the promise of becoming the standard technique for direct solid sampling. Analytical applications of LA now cover a great range of academic and industrial fields, including geology, environmental science, forensics, semiconductor manufacturing, and archaeology (2)(3)(4)(5)(6)(7)(8)(9).…”

Section: Richard E Russo •Xianglei Mao •Samuel S Maomentioning

confidence: 99%