Total and Differential Sputter Yields of Boron Nitride Measured by Quartz Crystal Microbalance and Weight Loss (Preprint)

Rubin, Binyamin; Topper, James L.; Yalin, Azer P.

doi:10.21236/ada473519

Cited by 4 publications

(14 citation statements)

References 26 publications

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“…Yield value increases with the increment in the beam energy; another notable thing is that sputter yield values are changing with angles of beam incidence; this heads towards that sputtering yield is a function of beam incident angle. On the other side, from figure 4 one can notice that for all energies with beam incident angle 0 • (surface normal), sputtering yield profiles are symmetric, this is what Sigmund claimed and same kind of profiles are reported; 1,6,11,13,[20][21][22][23] going further with oblique beam incident angles, sputter yield profile turns to asymmetric in the forward direction. At low energy of 100 eV i.e.…”

Section: E Qcm Data Validationsupporting

confidence: 72%

“…Due to sputter erosion, material from the channel wall remove and eventually exposes the underlying magnetic yoke, causing the magnetic field profile to be altered and the end of life to be reached. 1,[5][6][7][8][9][10][11] To investigate this important issue of ceramic wall erosion, a facility is developed equipped with Kaufmann Ion source, rotating Sputtering Quartz Crystal Microbalance (SQCM) Sensor and UHV load-lock arrangements for measuring in-situ volumetric sputtering yield, total sputtering yield (SY), and trajectory of the eroded anode wall material. For sputter yield measurement, couple of techniques have been reported that includes weight loss, 11,12 cavity ring-down spectroscopy (CRDS), 13,14 Rutherford backscattering (RBS), 15,16 Quartz Crystal Microbalance (QCM), 11,17,18 and mass spectroscopy.…”

Section: Introductionmentioning

confidence: 99%

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BN/BNSiO2 sputtering yield shape profiles under stationary plasma thruster operating conditions

et al. 2016

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Quartz Crystal Microbalance (QCM) is used to measure the volumetric and total sputtering yield of Boron Nitride (BN) and Boron Nitride Silicon Dioxide (BNSiO2) bombarded by Xenon ions in the energy range of 100 eV to 550 eV. Sputtering yield shape profiles are reported at various angles of incidence 0-85° with surface normal and compared with modified Zhang model. The yield shape profile is found to be symmetric at normal incidence and asymmetric at oblique incidence. Both the materials show a sudden jump in the sputtering yield above 500 eV and at an angle of incidence in the range of 45-65°. Erosion of BN at as low as 74 eV ion energy is predicted using generalized Bohdansky model. BNSiO2 show a marginally higher sputtering yield compare to BN.

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Section: E Qcm Data Validationsupporting

confidence: 72%

Section: Introductionmentioning

confidence: 99%

BN/BNSiO2 sputtering yield shape profiles under stationary plasma thruster operating conditions

et al. 2016

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“…The right of Figure 4 also shows BN sputter yields by QCM and weight loss from our past work 4,7,37,38 as well as measurements from other researchers [39][40][41][42][43] . The sputter yield from QCM measurements at CSU are plotted such that the lower reach of each error bar represents the lower possible bound of BN yield (i.e.…”

Section: B Results and Discussionmentioning

confidence: 94%

High-Sensitivity Boron Nitride Sputter Erosion Measurements by Continuous-Wave Cavity Ring-Down Spectroscopy

Yalin

Tao

Sullenberger

et al. 2008

44th AIAA/ASME/SAE/ASEE Joint Propulsion Conference &Amp;amp; Exhibit

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Sputter erosion of boron nitride (BN) plays a key life-limiting role in many Hall thrusters. We report on the development of cavity ring-down spectroscopy (CRDS) as a sensitive and accelerated diagnostic for sputter erosion. The measurement approach is based upon probing sputtered boron atoms in the region of 250 nm. We present quantitative detection of sputtered BN using CRDS with a pulsed laser source. The pulsed measurement results are compared with modeled signal levels. We update the development of a continuous-wave CRDS system using the frequency-quadrupled output of an external cavity diode laser as the light source. Characterizations of the measurement sensitivity show that with integration times of several minutes, the current performance would allow high signal-to-noise erosion measurements for expected thruster conditions. Approaches to increase sensitivity (reduce measurement time) and to integrate with vacuum chambers for thruster testing are summarized.

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“…3,5 Weight loss is also regularly used to measure sputter yield. [6][7][8] Profilometry require extended run times (weeks to months) to obtain accurate results, which translates to large amount of resources and time spent. Parametric studies for these two diagnostics are very difficult for any but the largest institutions to carry out and the test matrix must be picked out carefully beforehand with little margin for error.…”

Section: Introductionmentioning

confidence: 99%

“…2L c θ 2nLcos c ∆υ F ≈ = (8) where δυ is the spectral width of the individual resonance mode, ∆υ F is the frequency spacing between resonance peaks (also called the free spectral range), F is the cavity finesse, R M is the mirror reflectivity, n is the refractive index of the medium between the mirrors, and θ is the angle of incidence with respect to the mirror surface normal. Both n and cos θ are typically equal to 1.…”

Section: Introductionmentioning

confidence: 99%

Initial Cavity Ring-Down Density Measurement on a 6-kW Hall Thruster

Huang¹,

Galimore²,

Smith³

et al. 2011

47th AIAA/ASME/SAE/ASEE Joint Propulsion Conference &Amp;amp; Exhibit

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We present the initial results from a cavity ring-down sensor for measuring the density of sputtered boron atoms originating from the discharge channel of a 6-kW Hall thruster. The sensor traps 250 nm light in a high-finesse cavity to greatly increase its sensitivity to boron atoms. Measurements were obtained with the thruster operating at seven conditions spanning discharge voltages from 150 to 600 V, and anode mass flow rates from 10 to 30 mg/s. Power level at these operating conditions ranged from 1.5 to 10 kW. Boron density was found to vary from <1×10 14 to ~1×10 15 m-3 with the higher density measurements being found near the two channel walls. We apply a simple two-dimensional velocity model to obtain boron flux. The boron flux is then correlated to the boron nitride sputter rate, which is found to vary from 4×10-4 to 6×10-3 mm 3 /s. A simple power law equation is formulated to correlate the relative sputter rate for the 6-kW Hall thruster as a function of the tested operating conditions. Although the uncertainty in this initial result is high, the result clearly demonstrates previously untapped potential for the use of cavity ring-down spectroscopy to study the problem of Hall thruster channel wall erosion.

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Total and Differential Sputter Yields of Boron Nitride Measured by Quartz Crystal Microbalance and Weight Loss (Preprint)

Cited by 4 publications

References 26 publications

BN/BNSiO2 sputtering yield shape profiles under stationary plasma thruster operating conditions

BN/BNSiO2 sputtering yield shape profiles under stationary plasma thruster operating conditions

High-Sensitivity Boron Nitride Sputter Erosion Measurements by Continuous-Wave Cavity Ring-Down Spectroscopy

Initial Cavity Ring-Down Density Measurement on a 6-kW Hall Thruster

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