2009
DOI: 10.1088/0022-3727/42/20/205205
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Total and differential sputter yields of boron nitride measured by quartz crystal microbalance

Abstract: We present differential sputter yield measurements of boron nitride due to bombardment by xenon ions. A four-grid ion optics system is used to achieve a collimated ion beam at low energy (<100 eV). A quartz crystal microbalance is used to measure differential sputter yield profiles of condensable components from which total sputter yields can also be determined. We report total and differential sputter yields of three grades of boron nitride due to bombardment by xenon ions for ion energies in the range 60–500… Show more

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Cited by 35 publications
(30 citation statements)
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“…It is beyond the scope of this thesis to investigate about the most appropriate sputtering model so that the employed model was decided by the fitting to the Rubin's experiment result 36 with the assumption that the threshold energy equals to 25 eV. Accordingly, the arbitrary fitting parameters were calculated as A ¼ 3.64 and B ¼ 150.0.…”
Section: F Sputtering Modelmentioning
confidence: 99%
“…It is beyond the scope of this thesis to investigate about the most appropriate sputtering model so that the employed model was decided by the fitting to the Rubin's experiment result 36 with the assumption that the threshold energy equals to 25 eV. Accordingly, the arbitrary fitting parameters were calculated as A ¼ 3.64 and B ¼ 150.0.…”
Section: F Sputtering Modelmentioning
confidence: 99%
“…Thus, assuming the emission intensity is linearly proportional to the Boron density, the observation indicates that the erosion rate increases One explanation for the dramatic increase in the Boron erosion rate for increased discharge voltage is that the ions impacting the thruster ceramic walls have much higher energies for high-voltage cases. Experiments of Boron Nitride bombarded by Xe + show that sputtering yield increases as the ion energy impinging on the surface increases [5,22,23,24].In addition, it is expected that the plasma temperature increases as the discharge voltage is increased.Such an increase in plasma temperature would increase the electron induced excitation collision rate, thus the emission intensity. In addition, increased plasma temperature would result in an increase in the wall temperature.…”
Section: Voltage Scanmentioning
confidence: 99%
“…However, some of the high-energy ions hit the channel walls causing the sputtering of the ceramic insulator material [4]. Removal of the wall material this way, eventually causes the underlying magnetic yoke to be exposed [2,5].…”
Section: Introductionmentioning
confidence: 99%
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“…Also, if the thruster plume is not correctly focused, it can lead to spacecraft charging and arc formation on the solar panel surfaces, which is not good for the overall satellite life time. [1][2][3][4] Once the ceramic wall is completely eroded, the pole piece erosion will begin and there is possibility of modifying the magnetic field profile, which in turn will affect the performance of the thruster. Therefore, ceramic wall erosion investigation and choice of material is very important for the design of a plasma thruster.…”
Section: Introductionmentioning
confidence: 99%