Topology optimization of MEMS resonators with target eigenfrequencies and modes

Giannini, Daniele; Aage, Niels; Braghin, Francesco

doi:10.1016/j.euromechsol.2021.104352

Cited by 14 publications

(3 citation statements)

References 57 publications

(85 reference statements)

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“…In [ 30 ], we introduced a dynamic compliance-based optimization approach for resonant structures that uses the compliance goal function to have more control over the modal shape and for a more stable optimization process. As for applications, in [ 31 ], a 2D in-plane single mass MEMS gyroscopes were optimized using TO, which was later extended to a tuning fork resonator, i.e., a two mass configuration, in [ 32 ]. In [ 33 ], a composite material PEH was proposed as a result of a multi-material TO.…”

Section: Introductionmentioning

confidence: 99%

Multi-Objective Topology Optimization of a Broadband Piezoelectric Energy Harvester

Fitzer

Nguyen

et al. 2023

Micromachines

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In recent years, topology optimization has proved itself to be state of the art in the design of mechanical structures. At the same time, energy harvesting has gained a lot of attention in research and industry. In this work, we present a novel topology optimization of a multi-resonant piezoelectric energy-harvester device. The goal is to develop a broadband design that can generate constant power output over a range of frequencies, thus enabling reliable operation under changing environmental conditions. To achieve this goal, topology optimization is implemented with a combined-objective function, which tackles both the frequency requirement and the power-output characteristic. The optimization suggests a promising design, with satisfactory frequency characteristics.

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Section: Introductionmentioning

confidence: 99%

Multi-Objective Topology Optimization of a Broadband Piezoelectric Energy Harvester

Fitzer

Nguyen

et al. 2023

Micromachines

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“…In [2], the thickness distribution within the panel area has been optimized to achieve a maximum sound Transmission Loss (TL) in specific frequency bands, while employing a hybrid deterministic -statistical energy analysis (Det-SEA) model [3], in which the deterministic (FE) model of the plate is coupled with the sound fields in the source and receiving rooms, modelled as diffuse (SEA) subsystems. Following different works in topology optimization that focus on eigenfrequencies control to obtain the desired dynamic vibroacoustic performance [4][5][6], in [7] the thickness distribution in single panels has been optimized to push the structural eigenfrequencies as far as possible from a given disturbance frequency. The optimal layouts were found relying on an in-vacuo mechanical finite element model of a simply supported plate, that allows for a computationally efficient optimization.…”

Section: Introductionmentioning

confidence: 99%

Topology optimization of single and double panels for improved sound insulation in specific frequency bands

2023

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Single and double panels are commonly employed in noise control, e.g., as partitioning elements between rooms and to enclose noisy machines. In presence of narrowband disturbances, related for example to rotating machines, further improvements in sound insulation can be obtained by properly distributing the material within the area of the panels. This allows maximizing the sound Transmission Loss (TL) in the frequency band of interest by controlling structural resonances and antiresonances. In order to achieve this goal, in this work, we apply numerical topology optimization to find the optimal material thickness distribution for single and double panels. In the iterative design process, single panels are schematized through a simple mechanical Finite Element (FE) model, while double panels are modelled considering the vibroacoustic coupling between the two mechanical plates and the internal acoustic air cavity. The sound insulation properties of the designed solution are evaluated by TL computations through hybrid Finite Element-Statistical Energy Analysis (FE-SEA) simulations. The method is applied targeting different frequency bands in the audible range and focusing on practically relevant design cases, such as single and double PMMA and glazing panels.

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“…However, due to the limited number of design variables, complex optimization problems might not be solvable. Alternatively, topology optimization has been applied to obtain designs with tailored eigenfrequencies (Giannini et al, 2020b(Giannini et al, , 2022He et al, 2012). One advantage of topology optimization lies in the large design space that can be explored.…”

Section: Introductionmentioning

confidence: 99%

Thermoelastic damping in MEMS gyroscopes at high frequencies

2023

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Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g., in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability must be guaranteed under large external loads at high frequencies. The sensitivity of the sensor to such external loads depends strongly on the damping, or rather quality factor, of the high-frequency mechanical modes of the structure. In this paper, we investigate the influence of thermoelastic damping on several high-frequency modes by comparing finite element simulations with measurements of the quality factor in an application-relevant temperature range. We measure the quality factors over different temperatures in vacuum, to extract the relevant thermoelastic material parameters of the polycrystalline MEMS device. Our simulation results show a good agreement with the measured quantities, therefore proving the applicability of our method for predictive purposes in the MEMS design process. Overall, we are able to uniquely identify the thermoelastic effects and show their significance for the damping of the high-frequency modes of an industrial MEMS gyroscope. Our approach is generic and therefore easily applicable to any mechanical structure with many possible applications in nano- and micromechanical systems.

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Topology optimization of MEMS resonators with target eigenfrequencies and modes

Cited by 14 publications

References 57 publications

Multi-Objective Topology Optimization of a Broadband Piezoelectric Energy Harvester

Multi-Objective Topology Optimization of a Broadband Piezoelectric Energy Harvester

Topology optimization of single and double panels for improved sound insulation in specific frequency bands

Thermoelastic damping in MEMS gyroscopes at high frequencies

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