LIST OF TABLES
Problems with MEMSWhen developing MEMS, there are five main points of concern: (1) understanding and controlling the material properties of microstructure polycrystalline silicon films, (2) release of the microstructure, (3) material etch rates, (4) constraints defined by the combination of micromachining and integrated circuit fabrication technology, and (5) practices when packaging the completed devices (Shibaike, 1995;Rai-Choudhury, 1997). MEMS technologies represent a new field that is positioned to revolutionize many products and move forward the development of better micro-component subsystems.
Compliant DevicesWhen deploying a mechanical device, I hope to achieve motion, good strength, and low cyclic failure. This entails the transmission or use of forces that cause some form of deformation (Snelling & Erdman, 1974). At the macro-scale, distribution of forces is often accomplished by employing linkages, joints, and other components. In some cases this might require several linkages and configurations to achieve a desired output and functionality. Research has shown that a new family of devices called, "compliant mechanisms" (Midha, 1988) are able to produce desired functionality with just a few components. Thus, my research focuses primarily on creating a device that doesn't require a great deal The success of a compliant mechanism is determined by the device configuration. It is most important to develop a suitable topology, shape, and size. Two approaches proposed by G.K. Ananthasuresh (1995) discuss design optimization routines. One such method focuses on a kinematics-based approach when the topology of the compliant mechanism is known at the start and is approximated using a rigid body model. The second approach uses the continuum models and structural optimization algorithms to determine the topology of a fully compliant mechanism satisfying the functional behavior.Several other models have been proposed to provide a more systematic methodology to compute a suitable configuration. These other methods will be briefly discussed in chapter 2.In this investigation a micro-compliant gripper and micro-compliant clamp design are constructed. A study of the optimization design process, material selection, design factors, and fabrication processes for both designs are 13 investigated. The goal is to build a toolkit to optimize the best design independent of the fabrication process for compliant MEMS. This should facilitate a functional and analytical procedure that will make a seamless conversion process from non-compliant micro-mechanisms to compliant micro-mechanisms.The optimal compliant mechanism is a compromise between good stiffness and flexibility. If too flexible, it will not transmit a suitable force; if too stiff, it will not deform easily.