2014
DOI: 10.1063/1.4873397
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Top gating of epitaxial (Bi1−xSbx)2Te3 topological insulator thin films

Abstract: The tunability of the chemical potential for a wide range encompassing the Dirac point is important for many future devices based on topological insulators. Here we report a method to fabricate highly efficient top gates on epitaxially grown (Bi1−xSbx)2Te3 topological insulator thin films without degrading the film quality. By combining an in situ deposited Al2O3 capping layer and a SiNx dielectric layer deposited at low temperature, we were able to protect the films from degradation during the fabrication pro… Show more

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Cited by 40 publications
(46 citation statements)
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References 37 publications
(64 reference statements)
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“…This is in contrast to the case of 2D Dirac systems like graphene [32] and 3D TIs [33], where µ t shows an enhancement only when the Fermi level is tuned very close to the Dirac point.…”
mentioning
confidence: 39%
“…This is in contrast to the case of 2D Dirac systems like graphene [32] and 3D TIs [33], where µ t shows an enhancement only when the Fermi level is tuned very close to the Dirac point.…”
mentioning
confidence: 39%
“…26 This model nicely fits the data [see fits plotted in Fig. 3(c)], and implies a high mobility, low density (HMLD) channel and a low mobility, high density (LMHD) channel of the same sign (n-type) in all samples.…”
Section: -24mentioning
confidence: 53%
“…14,25,26 The CGT bulk is insulating at low temperatures, so any conduction channels lie in the Bi 2 Te 3 bulk or at the CGT-BT interface. In the two-band model, the measured Hall resistance depends on the magnetic field as…”
Section: -24mentioning
confidence: 99%
“…For Bi 2 Te 3 films, though, a systematic study is needed in order to determine a suitable capping layer that can preserve the surface states and avoid unintentional doping induced by ambient conditions. An insulating layer would be appropriate since it will allow the fabrication of nearly damage-free top gate structures, so that the carriers in the top surface can be efficiently tuned [55] V. CONCLUSION In summary, we have systematically investigated the effect of in situ exposure to pure oxygen at atmospheric pressure and of ex situ contamination on high quality intrinsic Bi 2 Te 3 films grown sapphire and STO. The XPS studies show narrow and symmetric Te and Bi peaks highlighting the absence of Te or Bi excess in our films.…”
Section: Extrinsic Defectsmentioning
confidence: 99%