Abstract:Top-emitting, oxide-confined, polyimideplanarized 980-nm VCSELs with copper-plated heatsinks were fabricated and characterized. Increasing the plated heatsink radius from 0-μ μ μ μm to 4-μ μ μ μm larger than the mesa diameter for lasers with 8-μ μ μ μm oxide aperture diameter reduced the measured thermal impedance, increased the maximum bias current density, and increased the maximum output optical power achieved by a 29%, 37%, and 73%, respectively. VCSELs with oxide aperture diameter and heatsink overlap of … Show more
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