Top‐Down Nanomechanical Machining of Three‐Dimensional Nanostructures by Atomic Force Microscopy

Abstract

communications Figure 7. AFM images of nanodot arrays of a) sine-shaped, b) hemispheric, and c) concave/convex nanopatterns.

Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

“…Micro/nano positioning technology is one of the key enabling methodologies for modern scientific and engineering applications including AFM (Atomic Force Microscopy), STM (Scanning Tunnel Microscopy), optical fiber alignment, bio-micro-surgery, bio-nanotechnology, and micro/nano assembly and manipulation [1][2][3][4][5]. It is well known that the static and dynamic characteristics of the micro/nano positioning mechanisms are mainly dependent on the structure of the mechanism and the performance of the actuator [6].…”

Fabrication of Arbitrary Three‐Dimensional Polymer Structures by Rational Control of the Spacing between Nanobrushes

“…In the last few years, 3D nanopatterns of polymers have been obtained by scanning probe nanomachining which relies on multiple cycles of serial top-down etching steps of organic resists. [9][10][11] Although such top-down methods provide highlyresolved topological structures, these methods are limited in the choice of resist materials and tuning the composition and properties of the surfaces is difficult. A more promising strategy is to construct 3D chemically functioning polymer brushes, that is, polymer chains tethered with one end on the surface, by combination of top-down nanofabrication of surface-immobilized initiators and bottom-up surface-initiated polymerization.…”

An inverse Prandtl–Ishlinskii model based decoupling control methodology for a 3-DOF flexure-based mechanism

“…where H r [u 1 The thresholds d and r are generally taken as constants in previous research [28,29]. And the values of the thresholds are commonly chosen based on the personal experience, leading to uncertainty that significantly affects the modeling results.…”

“…Micro/nano positioning is one of the key enabling techniques in the scientific and engineering fields including AFM (Atomic Force Microscopy) [1], STM (Scanning Tunnel Microscopy) [2], optical fiber alignment [3,4], bio-micro-surgery [5,6] and micro-assembly [7,8]. In order to reach the required high precision, the piezo-driven flexure-based mechanism has been widely used due to the large output force and quick response [9][10][11].…”