Tomography of Biological Materials using Focused Ion Beam Sectioning and Backscattered Electron Imaging

Winter, D. A. Matthijs de; Schneijdenberg, C. T. W. M.; Lebbink, Misjaël N.; Hekking, Lhp; Post, J.A.; Lich, Ben; Verkleij, A.J.; Drury, M. R.; Humbel, BM

doi:10.1017/s1431927609095312

Cited by 1 publication

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“…2) at different positions along the width of the FIBed sample. In addition, individual parameters can be modified to suit the large array of properties that polymer substrates have (Russell, 1998; Aubry, 2002; Fujii et al, 2005; Latif, 2005; Biance et al, 2006; Nellen et al, 2006; Stokes et al, 2006; Tjerkstra et al, 2008; de Winter et al, 2009; Schmidt et al, 2011).…”

Section: Principles and Guidelinesmentioning

confidence: 99%

“…Thanks to the use of TEM in the biological sciences, TEM sample preparation methods such as ultramicrotomy and cryo-FIB are currently used to deal with some of the problems mentioned above (Stokes et al, 2006; Hamley & Castelletto, 2007; Minor, 2009; de Winter et al, 2009). In the case of ultramicrotomy, a sharp blade is used to mechanically produce sequential thin sections of a hardened sample.…”

Section: Introductionmentioning

confidence: 99%

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Alternative FIB TEM Sample Preparation Method for Cross-Sections of Thin Metal Films Deposited on Polymer Substrates

2013

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Transmission electron microscopy (TEM) and focused ion beam (FIB) are proven tools to produce site-specific samples in which to study devices from initial processing to causes for failure, as well as investigating the quality, defects, interface layers, etc. However, the use of polymer substrates presents new challenges, in the preparation of suitable site-specific TEM samples, which include sample warping, heating, charging, and melting. In addition to current options that address some of these problems such as cryo FIB, we add an alternative method and FIB sample geometry that address these challenges and produce viable samples suitable for TEM elemental analysis. The key feature to this approach is a larger than usual lift-out block into which small viewing windows are thinned. Significant largely unthinned regions of the block are left between and at the base of the thinned windows. These large unthinned regions supply structural support and thermal reservoirs during the thinning process. As proof-of-concept of this sample preparation method, we also present TEM elemental analysis of various thin metallic films deposited on patterned polycarbonate, lacquer, and poly-di-methyl-siloxane substrates where the pattern (from low- to high-aspect ratio) is preserved.

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Section: Principles and Guidelinesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Alternative FIB TEM Sample Preparation Method for Cross-Sections of Thin Metal Films Deposited on Polymer Substrates

2013

View full text Add to dashboard Cite

show abstract

Tomography of Biological Materials using Focused Ion Beam Sectioning and Backscattered Electron Imaging

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Cited by 1 publication

References 8 publications

Alternative FIB TEM Sample Preparation Method for Cross-Sections of Thin Metal Films Deposited on Polymer Substrates

Alternative FIB TEM Sample Preparation Method for Cross-Sections of Thin Metal Films Deposited on Polymer Substrates

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