Tomographic Reconstruction by Quantitative Phase Imaging with Broadband Fields

Wang, Zhuo; Marks, Daniel L.; Carney, Scott; Mir, Mustafa; Popescu, Gabriel

doi:10.1364/ntm.2011.ntub2

Cited by 1 publication

(2 citation statements)

References 5 publications

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“…In this case application of super-resolution [19], quantitative phase imaging methods are more promising due to high lateral resolution, operating speed and absent of any mechanical electrical or magnetic interactions with measured surface [11,14].…”

Section: Discussion Of Resultsmentioning

confidence: 99%

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Nanoscale surface characterization using laser interference microscopy

Ignatyev¹,

Skrynnik²,

Melnik

2017

Mechanics & Industry

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Abstract. Nanoscale surface characterization is one of the most significant parts of modern materials development and application. The modern microscopes are expensive and complicated tools, and its use for industrial tasks is limited due to laborious sample preparation, measurement procedures, and low operation speed. The laser modulation interference microscopy method (MIM) for real-time quantitative and qualitative analysis of glass, metals, ceramics, and various coatings has a spatial resolution of 0.1 nm for vertical and up to 100 nm for lateral. It is proposed as an alternative to traditional scanning electron microscopy (SEM) and atomic force microscopy (AFM) methods. It is demonstrated that in the cases of roughness metrology for super smooth (Ra >1 nm) surfaces the application of a laser interference microscopy techniques is more optimal than conventional SEM and AFM. The comparison of semiconductor test structure for lateral dimensions measurements obtained with SEM and AFM and white light interferometer also demonstrates the advantages of MIM technique.

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Section: Discussion Of Resultsmentioning

confidence: 99%

“…The main advantage of methods above is an ability to reconstruct the quantitative topological phase relief [13,14] which combines optical and geometrical properties of an investigated sample. It is also known that some quantitative phase imaging methods demonstrate lateral superresolution up to 100 nm.…”

Section: Introductionmentioning

confidence: 99%